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STUDY ON THE TANTALIZING ON THE SURFACE OF TITANIUM ALLOY BY NET-SHAPE CATHODE GLOW DISCHARGING 被引量:1
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作者 f.chen H.Zhou +1 位作者 Y.F.Zhang J.D.Pan 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2005年第3期375-379,共5页
A new net-shape cathode sputtering target which has a simple structure and a hig h sputtering was put forward. The multiple-structure made of alloying and coatin g layers of tantalum was achieved on the surface of TC4... A new net-shape cathode sputtering target which has a simple structure and a hig h sputtering was put forward. The multiple-structure made of alloying and coatin g layers of tantalum was achieved on the surface of TC4 (Ti6Al4V) using this met hod in double glow surface alloying process. The tantalized samples were investi gated by SEM, XRD and electrochemical corrosion method .Results show the complic ated tissue of pure tantalizing layer and diffusion layer was successfully forme d on the surface of TC4 with the method of net-shape cathode glow discharge, whi ch further improved the corrosion-resistance of TC4 and formed good corrosion-re sistant alloys. 展开更多
关键词 TC4 (Ti6Al4V) cathode sputtering tantalizing
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Solid-state alloying of Al-Mg alloys by accumulative roll-bonding:Microstructure and properties 被引量:1
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作者 X.M.Mei Q.S.Mei +7 位作者 J.Y.Li C.L.Li L.Wan f.chen Z.H.Chen T.Xu Y.C.Wang Y.Y.Tan 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2022年第30期238-251,共14页
In this study,a novel solid-state alloying approach was adopted to fabricate Al-Mg alloys with high Mg contents(C_(Mg)) by accumulative roll-bonding(ARB)of Al and Mg elemental materials to ultrahigh cycles.Experimenta... In this study,a novel solid-state alloying approach was adopted to fabricate Al-Mg alloys with high Mg contents(C_(Mg)) by accumulative roll-bonding(ARB)of Al and Mg elemental materials to ultrahigh cycles.Experimental results showed that the degree of alloying increased with the increase of ARB cycles and a supersaturatedα-Al solid solution accompanied with nanoprecipitates was formed in the Al-Mg alloys by ARB to 70 cycles.The as-prepared Al-Mg alloys exhibited enhanced mechanical properties,with a maximum tensile strength of∼615 MPa and a tensile elongation of∼10%at C_(Mg)=13 wt.%.The high strength can be attributed to different mechanisms,namely solid solution strengthening,grain boundary strengthening,dislocation strengthening,and precipitation strengthening.The Al-Mg alloys showed increased work hardening with increasing C_(Mg),due to the enhanced formation of nanoprecipitates.Meanwhile,no obvious drop in the intergranular corrosion(IGC)resistance was found in the Al-Mg alloys with C_(Mg) up to 13 wt.%.Moreover,sensitization treatment was found to induce little decrease in the IGC resistance of the Al-Mg alloys with C_(Mg)≤13 wt.%.We found that the excellent IGC resistance was due to the suppression of grain boundary precipitation by the preferred formation of precipitates within the grains that were induced by ARB.Our study indicated the novelty of the present solid-state alloying approach to achieving a superior combination of high mechanical properties and IGC resistance in Al-Mg alloys. 展开更多
关键词 Solid-state alloying Al-Mg alloys Mechanical properties IGC resistance ARB
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用原位腔内清洗提高Al刻蚀的MTBC
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作者 f.chen Y.Huang +1 位作者 Q.Ge H.Ng 《功能材料与器件学报》 CAS CSCD 北大核心 2013年第5期252-254,共3页
优化原位腔清洗工艺可延长清洗之间Al刻蚀腔加工时间(MTBC),不损伤清洗腔内部,同时也保持了合理的产额。Cl/O2能非常有效地去除碳基聚合物,而BCl3/Cl最有利于去除Al副产品。通过提高压力得到了顶盖/侧壁清洗均匀性方面最好的改进。实行... 优化原位腔清洗工艺可延长清洗之间Al刻蚀腔加工时间(MTBC),不损伤清洗腔内部,同时也保持了合理的产额。Cl/O2能非常有效地去除碳基聚合物,而BCl3/Cl最有利于去除Al副产品。通过提高压力得到了顶盖/侧壁清洗均匀性方面最好的改进。实行最佳清洗工艺后,MTBC提高了4倍。 展开更多
关键词 Al MTBC 清洗工艺 均匀性 聚合物薄膜 产额 碳基 半导体器件 淀积 逻辑器件
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