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Simulation of monolithic active pixel sensor with high resistivity epitaxial layer
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作者 fu min tang zhenan 《Nuclear Science and Techniques》 SCIE CAS CSCD 2011年第5期265-271,共7页
The time and efficiency of charge collection are the key factors of monolithic active pixel sensor devices for minimum ionizing particles tracking detection.In this paper,3D models of pixels with different resistivity... The time and efficiency of charge collection are the key factors of monolithic active pixel sensor devices for minimum ionizing particles tracking detection.In this paper,3D models of pixels with different resistivity epitaxial layers(epi-layers) are built and simulated using Synopsys-Sentaurus.The basic characteristics of detectors are evaluated,including electric potential,electric field,and depleted region.Results indicate that the high resistivity (HR) epi-layer is a better choice.Further,simulation results show that the key collection performance is significantly improved owing to a wider and stronger electric field in the N type HR epi-layer. 展开更多
关键词 有源像素传感器 高电阻率 外延层 单片 模拟 Synopsys公司 电荷收集效率 跟踪检测
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