Transparent conductive oxide ZnSnO3 films were prepared by radio-frequency magnetron sputtering from powder targets and were characterized by X-ray photoelectron spectroscopy, X-ray diffraction, transmission electron ...Transparent conductive oxide ZnSnO3 films were prepared by radio-frequency magnetron sputtering from powder targets and were characterized by X-ray photoelectron spectroscopy, X-ray diffraction, transmission electron microscopy, atomic force microscopy, surface profile, UV-Vis spectroscopy, and Hall effect. The structures of the films were either amorphous or nanocrystalline depending on sputtering parameters including deposition time, target power, chamber pressure, and the target-substrate separation. The average transmittance of the ZnSnO3 films within the visible wavelength was approximately 80% and the resistivity of the ZnSnO3 films was in the range of 10^-3-10^-4 Ω cm. The structural, optical, and electrical properties of the ZnSnO3 films could be adjusted and regulated by optimizing the sputtering process, allowing materials with specific properties to be designed.展开更多
The diamond-like carbon(DLC)film on 316L stainless steel substrate was preparedpulsed plasma-enhanced chemical vapor deposition,and the performance of the films was optimizedregulating the pulse voltage.Microstructure...The diamond-like carbon(DLC)film on 316L stainless steel substrate was preparedpulsed plasma-enhanced chemical vapor deposition,and the performance of the films was optimizedregulating the pulse voltage.Microstructure and properties of DLC film on 316L stainless steel were characterizedatomic force microscopy,field-emission scanning electron microscopy,Raman spectra,nano-indenter and electrochemical workstations.The results showed that DLC films with smooth and dense morphology have a low friction coefficient and high nano-indentation hardness,and the surface hardness of 316L stainless steel substrate was enhancedmore than 3 times.The mechanical properties of DLC films and their bond with 316L stainless steel could be further optimizedincreasing pulse voltage.DLC films on 316L stainless steel substrate increased the self-corrosion potential0.173 V and decreased self-corrosion current99%,which significantly improved the anti-corrosive properties of 316L substrate.展开更多
基金financially supported by the National Natural Science Foundation of China (Nos. 51372109 and 51502126)the Foundation of Educational Department of Liaoning (No. L2015260)the Open Subject of Key Laboratory Liaoning Province (No. USTLKFSY201501)
文摘Transparent conductive oxide ZnSnO3 films were prepared by radio-frequency magnetron sputtering from powder targets and were characterized by X-ray photoelectron spectroscopy, X-ray diffraction, transmission electron microscopy, atomic force microscopy, surface profile, UV-Vis spectroscopy, and Hall effect. The structures of the films were either amorphous or nanocrystalline depending on sputtering parameters including deposition time, target power, chamber pressure, and the target-substrate separation. The average transmittance of the ZnSnO3 films within the visible wavelength was approximately 80% and the resistivity of the ZnSnO3 films was in the range of 10^-3-10^-4 Ω cm. The structural, optical, and electrical properties of the ZnSnO3 films could be adjusted and regulated by optimizing the sputtering process, allowing materials with specific properties to be designed.
基金This work was financially supported by the National Natural Science Foundation of China(Nos.51502126 and 51672119)the Natural Science Foundation of Liaoning Province(No.20180550802).
文摘The diamond-like carbon(DLC)film on 316L stainless steel substrate was preparedpulsed plasma-enhanced chemical vapor deposition,and the performance of the films was optimizedregulating the pulse voltage.Microstructure and properties of DLC film on 316L stainless steel were characterizedatomic force microscopy,field-emission scanning electron microscopy,Raman spectra,nano-indenter and electrochemical workstations.The results showed that DLC films with smooth and dense morphology have a low friction coefficient and high nano-indentation hardness,and the surface hardness of 316L stainless steel substrate was enhancedmore than 3 times.The mechanical properties of DLC films and their bond with 316L stainless steel could be further optimizedincreasing pulse voltage.DLC films on 316L stainless steel substrate increased the self-corrosion potential0.173 V and decreased self-corrosion current99%,which significantly improved the anti-corrosive properties of 316L substrate.
