The optical diffraction is a major means of minute diameter measurements. Since the light intensity of the diffraction fringe, mainly distributed in the central bright stripes, and that will lead to a relatively low S...The optical diffraction is a major means of minute diameter measurements. Since the light intensity of the diffraction fringe, mainly distributed in the central bright stripes, and that will lead to a relatively low SNR for the signal of the senior stripes. The traditional dark stripes extraction algorithm affected greatly by the noise. So this paper presents an algorithm that could effectively eliminate the gross errorcaused by the noise. Than by curve fitting the local signal of the diffraction pattern with the least square principle, the system could achieve a high measurement precision.展开更多
文摘The optical diffraction is a major means of minute diameter measurements. Since the light intensity of the diffraction fringe, mainly distributed in the central bright stripes, and that will lead to a relatively low SNR for the signal of the senior stripes. The traditional dark stripes extraction algorithm affected greatly by the noise. So this paper presents an algorithm that could effectively eliminate the gross errorcaused by the noise. Than by curve fitting the local signal of the diffraction pattern with the least square principle, the system could achieve a high measurement precision.
