科研人员在钻研科研问题与分享科研数据的过程中,需要某种基础设施来确保数据最大程度的获取性、稳定性和可用性。这类基础设施可以统称为科研数据知识库(Research Data Repository,RDR)。自2012年启动的re3data.org项目,主要从事科研...科研人员在钻研科研问题与分享科研数据的过程中,需要某种基础设施来确保数据最大程度的获取性、稳定性和可用性。这类基础设施可以统称为科研数据知识库(Research Data Repository,RDR)。自2012年启动的re3data.org项目,主要从事科研数据知识库的登记注册,以及为科研人员、科研资助组织、图书馆和出版商等提供有关异构科研数据知识库的全景概述。截至2013年7月,已有400个科研数据知识库向re3data.org登记,其中288个采用re3data.org的信息图标,以协助科研人员遴选合适的知识库,并且存储与重用他们的数据。这篇论文描绘异构RDR的全景,表述机构的、学科的、跨学科的以及项目专业的RDR类型。深入描述re3data.org的特性,以及这套注册系统如何协助科研人员分辨适合存储和搜索科研数据的知识库。展开更多
Smaller and more complex three-dimensional periodic nanostructures are part of the next generation of integrated electronic circuits.Additionally,decreasing the dimensions of nanostructures increases the effect of lin...Smaller and more complex three-dimensional periodic nanostructures are part of the next generation of integrated electronic circuits.Additionally,decreasing the dimensions of nanostructures increases the effect of line-edge roughness on the performance of the nanostructures.Efficient methods for characterizing three-dimensional nanostructures are required for process control.Here,extreme-ultraviolet(EUV)scatterometry is exploited for the analysis of line-edge roughness from periodic nanostructures.In line with previous observations,differences are observed between line edge and line width roughness.The angular distribution of the diffuse scattering is an interplay of the line shape,the height of the structure,the roughness along the line,and the correlation between the lines.Unfortunately,existing theoretical methods for characterizing nanostructures using scatterometry do not cover all these aspects.Examples are shown here and the demands for future development of theoretical approaches for computing the angular distribution of the scattered X-rays are discussed.展开更多
文摘科研人员在钻研科研问题与分享科研数据的过程中,需要某种基础设施来确保数据最大程度的获取性、稳定性和可用性。这类基础设施可以统称为科研数据知识库(Research Data Repository,RDR)。自2012年启动的re3data.org项目,主要从事科研数据知识库的登记注册,以及为科研人员、科研资助组织、图书馆和出版商等提供有关异构科研数据知识库的全景概述。截至2013年7月,已有400个科研数据知识库向re3data.org登记,其中288个采用re3data.org的信息图标,以协助科研人员遴选合适的知识库,并且存储与重用他们的数据。这篇论文描绘异构RDR的全景,表述机构的、学科的、跨学科的以及项目专业的RDR类型。深入描述re3data.org的特性,以及这套注册系统如何协助科研人员分辨适合存储和搜索科研数据的知识库。
基金funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 826589|MADEin4This Joint Undertaking receives support from the European Union’s Horizon 2020 research and innovation programme and The Netherlands,France,Belgium,Germany,Czech Republic,Austria,Hungary,and IsraelOpen Access funding enabled and organized by Projekt DEAL.
文摘Smaller and more complex three-dimensional periodic nanostructures are part of the next generation of integrated electronic circuits.Additionally,decreasing the dimensions of nanostructures increases the effect of line-edge roughness on the performance of the nanostructures.Efficient methods for characterizing three-dimensional nanostructures are required for process control.Here,extreme-ultraviolet(EUV)scatterometry is exploited for the analysis of line-edge roughness from periodic nanostructures.In line with previous observations,differences are observed between line edge and line width roughness.The angular distribution of the diffuse scattering is an interplay of the line shape,the height of the structure,the roughness along the line,and the correlation between the lines.Unfortunately,existing theoretical methods for characterizing nanostructures using scatterometry do not cover all these aspects.Examples are shown here and the demands for future development of theoretical approaches for computing the angular distribution of the scattered X-rays are discussed.
