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The interface of SiO_2/ZnS films studied by high resolution X-ray photoluminescence
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作者 Shinjita Acharya Orlando Trejo +3 位作者 Anup Dadlani Jan Torgersen Filippo Berto fritz prinz 《Theoretical & Applied Mechanics Letters》 CAS CSCD 2018年第1期24-27,共4页
Sharp interfaces in optoelectronic devices are key for proper band alignment. Despite its benefits as buffer layer, ZnS deposited via atomic layer deposition(ALD) renders intermixed interfaces to its substrate, which ... Sharp interfaces in optoelectronic devices are key for proper band alignment. Despite its benefits as buffer layer, ZnS deposited via atomic layer deposition(ALD) renders intermixed interfaces to its substrate, which can be detrimental for device performance. Here, we are attempting to elucidate the chemical species deriving from this metal-oxide to metal-sulfide transition studying ultrathin film ZnS on SiO_2 using high resolution X-ray photoluminescence spectroscopy(XPS).Regarding the S 2p spectra after a deposition of only three cycles of ZnS, we discover the many different chemical species in which S is present. These include intermediate oxides such as SO_4^(2-).These species become more obvious as we tilt the sample in the XPS chamber to shallower angles.Comparing the Si 2p and S 2p high resolution peaks in the depth profile, one can clearly uncover the confinement of SO_4^(2-) to the interface of the underlying substrate. This may indicate that SiO_2/ZnS interfaces contain interfacial sulphates that likely alter the electronic configuration of this interface. 展开更多
关键词 Atomic Layer Deposition Metal-Sulfide Zinc SULFIDE INTERFACE High resolution X-RAY PHOTOLUMINESCENCE spectroscopy
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下一代能量转换装置用ALD阀门
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作者 Tim Holme fritz prinz John Baxter 《集成电路应用》 2009年第6期31-32,共2页
气候变化、能源安全和化石燃料短缺促使人们去研究太阳能电池、氢燃料电池等清洁、高效的能量转换装置。燃料电池和太阳能电池需要运输载荷子穿过一个薄膜来将其发送给外部电路。因此,能够沉积优质、保形、均匀且尽可能薄(以降低薄膜... 气候变化、能源安全和化石燃料短缺促使人们去研究太阳能电池、氢燃料电池等清洁、高效的能量转换装置。燃料电池和太阳能电池需要运输载荷子穿过一个薄膜来将其发送给外部电路。因此,能够沉积优质、保形、均匀且尽可能薄(以降低薄膜内载荷子运输带来的电阻损耗)的薄膜沉积技术将使上述两种电池技术受益。 展开更多
关键词 能量转换装置 薄膜沉积技术 ALD 太阳能电池 氢燃料电池 阀门 气候变化 化石燃料
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