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BIMORPH-TYPE PIEZOELECTRIC THIN FILM BENDING ACTUATORS SYNTHESIZED BY HYDROTHERMAL METHOD 被引量:2
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作者 DuLiqun AraiFumihito +1 位作者 fukudatoshio KwonGuiryong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2004年第2期226-229,共4页
Lead zirconate titanium solid-solution (PZT) thin films with variousthickness are synthesized on titanium substrates by repeated hydrothermal treatments. Young modulus,electric-field-induced displacement and the densi... Lead zirconate titanium solid-solution (PZT) thin films with variousthickness are synthesized on titanium substrates by repeated hydrothermal treatments. Young modulus,electric-field-induced displacement and the density of the PZT film are measured respectively.Bimorph- type bending actuators are fabricated using these films. The model, which is used toanalyze the driving ability of bimorph-type bending actuators by hydrothermal method, is set up. Itcan be seen that the driving ability of bimorph-type bending actuators can be greatly improved byoptimizing the thickness of PZT thin film and substrate from the theoretical analysis results. Themeasured values are expected to agree with the theoretical values calculated by the above model. 展开更多
关键词 Driving ability Bimorph-type bending actuators Hydrothermal method Piezoelectric thin film
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MICRO TOUCH SENSOR USING PIEZOELECTRIC THIN FILM FOR MINIMAL ACCESS SURGERY 被引量:1
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作者 DuLiqun ZhaoHaibo +1 位作者 fukudatoshio AraiFumihito 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2005年第1期87-91,共5页
The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zircona... The micro touch sensor which is designed to be used in the blood vessels isproposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype ofmicro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal methodis made. The basic properties of the micro touch sensor are studied. In order to analyse theproperties of the micro touch sensor, a mathematical model is set up. 展开更多
关键词 Touch sensor PZT thin film Hydrothermal method CATHETER
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