High quality diamond films have been deposited on Si(100) mirror surface without using any surface pretreatment such as abrasive diamond scratching,diamond-like carbon predeposition or oil treatment.The experiments ar...High quality diamond films have been deposited on Si(100) mirror surface without using any surface pretreatment such as abrasive diamond scratching,diamond-like carbon predeposition or oil treatment.The experiments are carried out in the hot filament chemical vapour deposition system by using the mixture of methane,hydrogen and oxygen.The films show the well-defined facets and are confirmed by Raman spectroscopy and scanning electron microscopy to be high quality diamond films.In this deposition process,higher substrate temperature,high filament temperature and oxygen addition play the important roles in diamond nucleation on the mirror-smooth Si(100) surface.展开更多
A new method is proposed for generation of high density diamond nuclei in the dc glow discharge chemical vapor deposition.Application of dc negative valtage together with high methane content has been found to generat...A new method is proposed for generation of high density diamond nuclei in the dc glow discharge chemical vapor deposition.Application of dc negative valtage together with high methane content has been found to generate diamond nuclei as high as 10^(10)/cm^(2) on mirror-polished Si wafer.It has been indicated that carbon over-saturation,negative voltage and hydrogen play an important role in this new pretreatment process.展开更多
基金the National Natural Science Foundation of China.
文摘High quality diamond films have been deposited on Si(100) mirror surface without using any surface pretreatment such as abrasive diamond scratching,diamond-like carbon predeposition or oil treatment.The experiments are carried out in the hot filament chemical vapour deposition system by using the mixture of methane,hydrogen and oxygen.The films show the well-defined facets and are confirmed by Raman spectroscopy and scanning electron microscopy to be high quality diamond films.In this deposition process,higher substrate temperature,high filament temperature and oxygen addition play the important roles in diamond nucleation on the mirror-smooth Si(100) surface.
基金the National Natural Science Foundation of China.
文摘A new method is proposed for generation of high density diamond nuclei in the dc glow discharge chemical vapor deposition.Application of dc negative valtage together with high methane content has been found to generate diamond nuclei as high as 10^(10)/cm^(2) on mirror-polished Si wafer.It has been indicated that carbon over-saturation,negative voltage and hydrogen play an important role in this new pretreatment process.