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Characterization of High-Energy-Heavy-Ion-Induced Defects in GaAs by Positron Annihilation
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作者 ZHU Sheng-yun LUO Qi +5 位作者 FAN Zhi-guo WANG Chun-rui ZHENG Sheng-nan gou zhen-hui LI An-li QIAN Jia-yu 《Chinese Physics Letters》 SCIE CAS CSCD 1997年第7期535-537,共3页
The defects induced by 64 MeV ^(19)F ion irradiation to a Auence of 4.3×10^(16)/cm^(2) are investigated in GaAs by positron annihilation lifetime technique.Di-vacancies are created by the irradiation.The formatio... The defects induced by 64 MeV ^(19)F ion irradiation to a Auence of 4.3×10^(16)/cm^(2) are investigated in GaAs by positron annihilation lifetime technique.Di-vacancies are created by the irradiation.The formation of tri-and quadri-vacancies is observed during thermal annealing.The di-,tri-and quadri-vacancies are annealed away at 350,550 and 800℃,respectively. 展开更多
关键词 technique. ANNIHILATION LIFETIME
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