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A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine 被引量:1
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作者 Helen Steins Michael Mierzejewski +9 位作者 Lisa Brauns Angelika Stumpf Alina Kohler gerhard heusel Andrea Corna Thoralf Herrmann Peter D.Jones Günther Zeck Rene von Metzen Thomas Stieglitz 《Microsystems & Nanoengineering》 SCIE EI CSCD 2022年第6期165-179,共15页
Recording neural signals from delicate autonomic nerves is a challenging task that requires the development of a lowinvasive neural interface with highly selective,micrometer-sized electrodes.This paper reports on the... Recording neural signals from delicate autonomic nerves is a challenging task that requires the development of a lowinvasive neural interface with highly selective,micrometer-sized electrodes.This paper reports on the development of a three-dimensional(3D)protruding thin-film microelectrode array(MEA),which is intended to be used for recording low-amplitude neural signals from pelvic nervous structures by penetrating the nerves transversely to reduce the distance to the axons.Cylindrical gold pillars(O 20 or 50μm,~60μm height)were fabricated on a micromachined polyimide substrate in an electroplating process.Their sidewalls were insulated with parylene C,and their tips were optionally modified by wet etching and/or the application of a titanium nitride(TiN)coating.The microelectrodes modified by these combined techniques exhibited low impedances(~7 kΩ at 1 kHz for ∅ 50μm microelectrode with the exposed surface area of~5000μm^(2))and low intrinsic noise levels.Their functionalities were evaluated in an ex vivo pilot study with mouse retinae,in which spontaneous neuronal spikes were recorded with amplitudes of up to 66μV.This novel process strategy for fabricating flexible,3D neural interfaces with low-impedance microelectrodes has the potential to selectively record neural signals from not only delicate structures such as retinal cells but also autonomic nerves with improved signal quality to study neural circuits and develop stimulation strategies in bioelectronic medicine,e.g.,for the control of vital digestive functions. 展开更多
关键词 NEURAL MICROELECTRODE ELECTRONIC
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