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Air-coupled PMUTs array with residual stresses:experimental tests in the linear and non-linear dynamic regime
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作者 gianluca massimino Borka Lazarova +1 位作者 Fabio Quaglia Alberto Corigliano 《International Journal of Smart and Nano Materials》 SCIE EI 2020年第4期387-399,共13页
The mechanical characterization of a 4×4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers(PMUTs)is pre-sented.The experimental campaign consists of three set of experi-mental tests,namely:t... The mechanical characterization of a 4×4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers(PMUTs)is pre-sented.The experimental campaign consists of three set of experi-mental tests,namely:topography measurements,small signal dynamic measurements,and vibrometry in the non-linear dynamic regime.The behavior of three different kinds of PMUT are reported.They differ according to the thermo-electrical treatment that has been applied to the piezoelectric material.The presence of the fabrication induced residual stresses is investigated and the treat-ment effect is evaluated in terms of the initial deflected configura-tion.The results reported in this paper represent an experimental mechanical investigation useful for the design of PMUT structures with advanced functionalities in the linear and non-linear regime. 展开更多
关键词 acoustic-structure interaction ARRAY experimental characterization non-linear dynamics Piezoelectric Micromachined Ultrasonic Transducers(PMUTs) ULTRASOUND
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