Effect of Free Radicals on Irradiation Chemistry of a Double-Coordination Organotin(Sn_(4))Photoresist by Adjusting Alkyl Ligands

Metal oxide cluster(MOC)photoresists are highly promising materials for the next generation of extreme ultraviolet lithography(EUVL).The consecutive exploration of novel MOC materials and their structural irradiation chemistry are the major concerns associated with EUVL.Herein,we report two bicoordinated tin-oxo clusters(TOCs),the organic ligands of which contain both adamantane carboxylic acids and alkyl groups(methyl:Sn_(4)–Me–C10;butyl:Sn_(4)–Bu–C10).We explore the correlation between the structures of the TOCs and their patterning properties by adjusting the alkyl groups coordinated to the Sn atom.The structural variation causes different irradiation chemistry,with Sn_(4)–Me–C10 exhibiting improved resolution and Sn_(4)–Bu–C10 demonstrating higher sensitivity.These differences are attributed to the bonding energies of the Sn-methyl and Sn-butyl groups,the size of the resulting alkyl radicals,and their reaction probabilities.Both clusters occur in the reactions of Sn–C bond cleavage and the decarboxylation of adamantane carboxylic acids upon irradiation.However,the entire process exhibits distinct characteristics.Based on the electron-beam lithography and other experiments,we proposed irradiationinduced reaction mechanisms for both clusters.The Sn_(4)–Bu–C10 cluster predominantly undergoes alkane chain linkage,whereas the Sn_(4)–Me–C10 cluster mainly follows the adamantanes linkage pathway.

Heterometallic Ti-Zr oxo nanocluster photoresists for advanced lithography

Extreme ultraviolet lithography(EUVL)and electron beam lithography(EBL)are considered to be crucial lithography techniques utilized in the fabrication of nanoscale semiconductor devices.However,the industry currently faces a scarcity of EUV photoresists that meet the increasingly challenging standards in terms of resolution,sensitivity and roughness.Metal oxo nanoclusters have garnered significant interest in the field of EUV photoresist due to their relatively stronger absorption cross-section for extreme ultraviolet light and lower dimensions.In this study,we utilize a heterometallic nanocluster strategy by a combination of titanium and zirconium metals to investigate their solubility,assess the suitability of various developers,and evaluate their performance in electron-beam and EUVL,as well as study their etch resistance for pattern transfer.We demonstrate that R-4 is able to get a critical dimension(CD)of 25 nm at low doses under EBL,as well as 50 nm resolution at EUVL with a remarkable sensitivity of 19.7 mJ cm−2.This study offers an efficient heterometallic method for optimizing the lithographic performance of metal oxo nanocluster photoresists,which can benefit the development of commercially viable next-generation EUV photoresists.

Relations between man and nature reflected by the evolution of the Neolithic production tools in the Three Gorges region of Yangtze River,China

The relations between man and nature reflected by evolution of Neolithic production tools in the Three Gorges region of Yangtze River is discussed in this paper.Our results show that there is a good correlation between the percentage vibration of cutting tool types and the environmental evolution indicated by the natural profile nearby.It is possible for ancestors from the Three Gorges region to learn the advantage of mortise and tenon in the early Neolithic Age because they used the stones as vital tools for processing woods.The hunting method in the early Neolithic is throwing,which was inherited in the mid-Neolithic Age when hunting with arrow and bow was developed.Fishing tools are found at the same period.Numbers of net sinkers and spinning wheels unearthed from the strata of the Western Zhou Dynasty from Zhongba Site reveal the fact of fishing with net,while a mass of fishbone pits indi- cate the powerful productivity brought by new production tools.Quantity of stone spades and stone hoes proves that cultivation agriculture by hoe is extremely attached importance by the ancestors in the Three Gorges region.Moreover,the developed agriculture in Daxi Culture at Zhongbao Island benefits from the landform,climate,traffic location,etc.Otherwise,the reason that the farming tools declined in the late Neolithic Age is related to the extreme flood during the early Xia Dynasty and the fishing hunting preference of some ancient settlements.This research shows that ancestors of the Three Gorges region during the Neolithic Age attached importance to fish hunting and cultivation, fought against the natural environment by production tools,constantly created and improved them, then comprehensively utilized them to evolve the relations between man and nature.