The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of...The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in nozzles are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.展开更多
基金the financial support of the German Ministry of Education and Science BMBF for the Project ‘Mikrofiz’ under Grant No. FKZ13N9495
文摘The measurement of boreholes with diameters smaller than 500 μm is a demanding task that cannot be performed using state-of-the-art production metrology. In this letter, a miniaturized fiber probe with a diameter of 80μm is presented. A probe is used for low-coherence interferometry to conduct highly precise measurements of form deviations of small boreholes. Measurements conducted in nozzles are also presented. The results prove the potential of the fiber-optical sensor for quality inspection of high-precision parts, such as injection nozzles, for common-rail diesel engines.
