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Development of 8-inch Key Processes for Insulated-Gate Bipolar Transistor 被引量:5
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作者 guoyou liu Rongjun Ding Haihui Luo 《Engineering》 SCIE EI 2015年第3期361-366,共6页
Based on the construction of the 8-inch fabricat ion line, advanced process technology of 8-inch wafer, as well as the fourth-generation high-voltage double-diffused metal-oxide semiconductor(DMOS+) insulated-gate bip... Based on the construction of the 8-inch fabricat ion line, advanced process technology of 8-inch wafer, as well as the fourth-generation high-voltage double-diffused metal-oxide semiconductor(DMOS+) insulated-gate bipolar transistor(IGBT) technology and the fifth-generation trench gate IGBT technology, have been developed, realizing a great-leap forward technological development for the manufacturing of high-voltage IGBT from 6-inch to 8-inch. The 1600 A/1.7 kV and 1500 A/3.3 kV IGBT modules have been successfully fabricated, qualified, and applied in rail transportation traction system. 展开更多
关键词 insulated-gate bipolar transistor (IGBT) high power density trench gate 8-inch rail transportation
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