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Study of Three Different Types of Plasma Ion Sources
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作者 M.M.ABDELRAhMAN h.el-khabeary 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第5期604-608,共5页
Three types of plasma ion sources designed, manufactured and optimized in the Accelerators and Ion Sources Department, Nuclear Research Center, Atomic Energy Authority are introduced. Different means were investigated... Three types of plasma ion sources designed, manufactured and optimized in the Accelerators and Ion Sources Department, Nuclear Research Center, Atomic Energy Authority are introduced. Different means were investigated to generate the discharge current and ion beam current extracted from the plasma. The various plasmas described include a DC glow discharge plasma, an arc discharge plasma and a radio frequency discharge plasma. 展开更多
关键词 ion sources ionization processes sputtering and etching processes
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