Investigation was made of the deposited rate,surface morphology and crystal pre- ferred orientation of the dense TiC coating onto austenitic stainless steel in relation with CH_4/TiCl_4 mole ratio and temperature adop...Investigation was made of the deposited rate,surface morphology and crystal pre- ferred orientation of the dense TiC coating onto austenitic stainless steel in relation with CH_4/TiCl_4 mole ratio and temperature adopted in CVD processing. When the CH_4/TiCl_4 ratio is low or high,the preferred orientation may be(220)or(200),respec- tively,which is mainly dependent on the equilibrium concentration of active C in vapour phase.展开更多
文摘Investigation was made of the deposited rate,surface morphology and crystal pre- ferred orientation of the dense TiC coating onto austenitic stainless steel in relation with CH_4/TiCl_4 mole ratio and temperature adopted in CVD processing. When the CH_4/TiCl_4 ratio is low or high,the preferred orientation may be(220)or(200),respec- tively,which is mainly dependent on the equilibrium concentration of active C in vapour phase.
