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Chemisorption-Induced Resonance Frequency Shift of a Microcantilever 被引量:1
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作者 ZHANG Ji-Qiao FENG Xi-Qiao +1 位作者 huang gan-yun YU Shou-Wen 《Chinese Physics Letters》 SCIE CAS CSCD 2012年第5期193-196,共4页
The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption.The resonance frequency change of a cantilever induc... The autonomy and property of atoms/molecules adsorbed on the surface of a microcantilever can be probed by measuring its resonance frequency shift due to adsorption.The resonance frequency change of a cantilever induced by chemisorption is theoretically studied. Oxygen chemisorbed on the Si(100) surface is taken as a representative example.We demonstrate that the resonant response of the cantilever is mainly determined by the chemisorption-induced bending stiffness variation,which depends on the bond configurations formed by the adsorbed atoms and substrate atoms.This study is helpful for optimal design of microcantilever-based sensors for various applications. 展开更多
关键词 CANTILEVER adsorbed SORPTION
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