MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the Mo...MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the MoST? coatings are characteristic of dense coherent structures, with high adhesion (critical scratch load above 120 N), high load bearing capacity up to 5 GPa., low friction (0.02-0.1), high wear resistance (less than 4xlO"17 m3/N m) even at a relative humidity of 40%, and high temperature resistance up to 350 °C. The successful applications of MoST? coatings in large- scale productions for dry cutting and forming, with increasing lifetime and productivity are presented.展开更多
Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different ...Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. In this paper, the process parameters, such as substrate temperature, substrate bias and OEM control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and Scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear-resistant; micro-hardness was also used to determine coating hardness. HSS drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings.展开更多
文摘MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the MoST? coatings are characteristic of dense coherent structures, with high adhesion (critical scratch load above 120 N), high load bearing capacity up to 5 GPa., low friction (0.02-0.1), high wear resistance (less than 4xlO"17 m3/N m) even at a relative humidity of 40%, and high temperature resistance up to 350 °C. The successful applications of MoST? coatings in large- scale productions for dry cutting and forming, with increasing lifetime and productivity are presented.
文摘Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. In this paper, the process parameters, such as substrate temperature, substrate bias and OEM control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and Scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear-resistant; micro-hardness was also used to determine coating hardness. HSS drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings.
