Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemica...Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemical properties at elevated temperature.However,with the emerging of additive manufacturing,the use of ceramics for functional and structural MEMS raises new opportunities and challenges.This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS,including additive and conventional manufacturing technologies.The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles,main features,and processed materials.Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers,post-processing at the micro-level,resolution,and quality control.The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications,which indicates a promising future.展开更多
Additive manufacturing(AM)technologies are currently employed for the manufacturing of completely functional parts and have gained the attention of hightechnology industries such as the aerospace,automotive,and biomed...Additive manufacturing(AM)technologies are currently employed for the manufacturing of completely functional parts and have gained the attention of hightechnology industries such as the aerospace,automotive,and biomedical fields.This is mainly due to their advantages in terms of low material waste and high productivity,particularly owing to the flexibility in the geometries that can be generated.In the tooling industry,specifically the manufacturing of dies and molds,AM technologies enable the generation of complex shapes,internal cooling channels,the repair of damaged dies and molds,and an improved performance of dies and molds employing multipleAMmaterials.Inthepresentpaper,a reviewof AM processes and materials applied in the tooling industry for the generation of dies and molds is addressed.AM technologies used for tooling applications and the characteristics of the materials employed in this industry are first presented.In addition,the most relevant state-of-the-art approaches are analyzed with respect to the process parameters and microstructural and mechanical properties in the processing of high-performance tooling materials used in AM processes.Concretely,studies on the AM of ferrous(maraging steels and H13 steel alloy)and non-ferrous(stellite alloys and WC alloys)tooling alloys are also analyzed.展开更多
文摘Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemical properties at elevated temperature.However,with the emerging of additive manufacturing,the use of ceramics for functional and structural MEMS raises new opportunities and challenges.This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS,including additive and conventional manufacturing technologies.The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles,main features,and processed materials.Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers,post-processing at the micro-level,resolution,and quality control.The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications,which indicates a promising future.
文摘Additive manufacturing(AM)technologies are currently employed for the manufacturing of completely functional parts and have gained the attention of hightechnology industries such as the aerospace,automotive,and biomedical fields.This is mainly due to their advantages in terms of low material waste and high productivity,particularly owing to the flexibility in the geometries that can be generated.In the tooling industry,specifically the manufacturing of dies and molds,AM technologies enable the generation of complex shapes,internal cooling channels,the repair of damaged dies and molds,and an improved performance of dies and molds employing multipleAMmaterials.Inthepresentpaper,a reviewof AM processes and materials applied in the tooling industry for the generation of dies and molds is addressed.AM technologies used for tooling applications and the characteristics of the materials employed in this industry are first presented.In addition,the most relevant state-of-the-art approaches are analyzed with respect to the process parameters and microstructural and mechanical properties in the processing of high-performance tooling materials used in AM processes.Concretely,studies on the AM of ferrous(maraging steels and H13 steel alloy)and non-ferrous(stellite alloys and WC alloys)tooling alloys are also analyzed.
