Hydrogen distribution and content in diamond films deposited by DC arcjetunder gas recycling mode was evaluated by nuclear reaction analysis (NRA). The films werecharacterized using scanning electron microscopy, X-ray...Hydrogen distribution and content in diamond films deposited by DC arcjetunder gas recycling mode was evaluated by nuclear reaction analysis (NRA). The films werecharacterized using scanning electron microscopy, X-ray diffraction and Raman spectrometry. The NRAresults show that the hydrogen content in diamond films was approximately 0.6% (substratetemperature 770℃), and strongly depended on the substrate temperature. It was that the hydrogencontent increased with the increase of the substrate temperature. The possibility of hydrogentrapping in the films was also discussed.展开更多
文摘Hydrogen distribution and content in diamond films deposited by DC arcjetunder gas recycling mode was evaluated by nuclear reaction analysis (NRA). The films werecharacterized using scanning electron microscopy, X-ray diffraction and Raman spectrometry. The NRAresults show that the hydrogen content in diamond films was approximately 0.6% (substratetemperature 770℃), and strongly depended on the substrate temperature. It was that the hydrogencontent increased with the increase of the substrate temperature. The possibility of hydrogentrapping in the films was also discussed.
