Accompanying the unceasing progress of integrated circuit manufacturing technology, the mainstream production mode of current semiconductor wafer fabrication is featured with multi-variety, small batch, and individual...Accompanying the unceasing progress of integrated circuit manufacturing technology, the mainstream production mode of current semiconductor wafer fabrication is featured with multi-variety, small batch, and individual customization, which poses a huge challenge to the scheduling of cluster tools with single-wafer-type fabrication. Concurrent processing multiple wafer types in cluster tools, as a novel production pattern, has drawn increasing attention from industry to academia, whereas the corresponding research remains insufficient. This paper investigates the scheduling problems of dual-arm cluster tools with multiple wafer types and residency time constraints. To pursue an easy-to-implement cyclic operation under diverse flow patterns,we develop a novel robot activity strategy called multiplex swap sequence. In the light of the virtual module technology, the workloads that stem from bottleneck process steps and asymmetrical process configuration are balanced satisfactorily. Moreover, several sufficient and necessary conditions with closed-form expressions are obtained for checking the system's schedulability. Finally, efficient algorithms with polynomial complexity are developed to find the periodic scheduling, and its practicability and availability are demonstrated by the offered illustrative examples.展开更多
Elementary siphons are useful in the development of a deadlock prevention policy for a discrete event system modeled with Petri nets. This paper proposes an algorithm to iteratively extract a set of elementary siphons...Elementary siphons are useful in the development of a deadlock prevention policy for a discrete event system modeled with Petri nets. This paper proposes an algorithm to iteratively extract a set of elementary siphons in a class of Petri nets, called system of simple sequential processes with resources （S3pR）. At each iteration, by a mixed-integer programming （MIP） method, the proposed algorithm finds a maximal unmarked siphon, classifies the places in it, extracts an elementary siphon from the classified places, and adds a new constraint in order to extract the next elementary siphon. This algorithm iteratively executes until no new unmarked siphons can be found. It finally obtains a unique set of elementary siphons and avoids a complete siphon enumeration. A theoretical analysis and examples are given to demonstrate its efficiency and practical potentials.展开更多
基金supported in part by the National Natural Science Foundation of China(71361014,61973242,61573265,51665018)the Major Fundamental Research Program of the Natural Science Foundation of Shaanxi Province(2017ZDJC-34)。
文摘Accompanying the unceasing progress of integrated circuit manufacturing technology, the mainstream production mode of current semiconductor wafer fabrication is featured with multi-variety, small batch, and individual customization, which poses a huge challenge to the scheduling of cluster tools with single-wafer-type fabrication. Concurrent processing multiple wafer types in cluster tools, as a novel production pattern, has drawn increasing attention from industry to academia, whereas the corresponding research remains insufficient. This paper investigates the scheduling problems of dual-arm cluster tools with multiple wafer types and residency time constraints. To pursue an easy-to-implement cyclic operation under diverse flow patterns,we develop a novel robot activity strategy called multiplex swap sequence. In the light of the virtual module technology, the workloads that stem from bottleneck process steps and asymmetrical process configuration are balanced satisfactorily. Moreover, several sufficient and necessary conditions with closed-form expressions are obtained for checking the system's schedulability. Finally, efficient algorithms with polynomial complexity are developed to find the periodic scheduling, and its practicability and availability are demonstrated by the offered illustrative examples.
基金supported by the Natural Science Foundation of China under Grant No.60773001,61074035, 61064003,and 50978129the Fundamental Research Funds for the Central Universities under Grant No. JY 10000904001+2 种基金the National Research Foundation for the Doctoral Program of Higher Education,the Ministry of Education,P.R.China,under Grant No.20090203110009the"863"High-tech Research and Development Program of China under Grant No.2008AA04Z 109the Alexander von Humboldt Foundation
文摘Elementary siphons are useful in the development of a deadlock prevention policy for a discrete event system modeled with Petri nets. This paper proposes an algorithm to iteratively extract a set of elementary siphons in a class of Petri nets, called system of simple sequential processes with resources （S3pR）. At each iteration, by a mixed-integer programming （MIP） method, the proposed algorithm finds a maximal unmarked siphon, classifies the places in it, extracts an elementary siphon from the classified places, and adds a new constraint in order to extract the next elementary siphon. This algorithm iteratively executes until no new unmarked siphons can be found. It finally obtains a unique set of elementary siphons and avoids a complete siphon enumeration. A theoretical analysis and examples are given to demonstrate its efficiency and practical potentials.
