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Photovoltaic properties of Cu_2O-based heterojunction solar cells using n-type oxide semiconductor nano thin films prepared by low damage magnetron sputtering method 被引量:1
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作者 Toshihiro Miyata Kyosuke Watanabe +1 位作者 hiroki tokunaga Tadatsugu Minami 《Journal of Semiconductors》 EI CAS CSCD 2019年第3期29-32,共4页
We improved the photovoltaic properties of Cu_2O-based heterojunction solar cells using n-type oxide semiconductor thin films prepared by a sputtering apparatus with our newly developed multi-chamber system. We also o... We improved the photovoltaic properties of Cu_2O-based heterojunction solar cells using n-type oxide semiconductor thin films prepared by a sputtering apparatus with our newly developed multi-chamber system. We also obtained the highest efficiency(3.21%) in an AZO/p-Cu_2O heterojunction solar cell prepared with optimized pre-sputtering conditions using our newly developed multi-chamber sputtering system. This value achieves the same or higher characteristics than AZO/Cu_2O solar cells with a similar structure prepared by the pulse laser deposition method. 展开更多
关键词 CU2O AZO solar cell oxide thin film MAGNETRON SPUTTERING
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Criteria for versatile GaN MOVPE tool:high growth rate GaN by atmospheric pressure growth
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作者 Koh Matsumoto Kazutada Ikenaga +11 位作者 Jun Yamamoto Kazuki Naito Yoshiki Yano Akinori Ubukata hiroki tokunaga Tadanobu Arimura Katsuaki Cho Toshiya Tabuchi Akira Yamaguchi Yasuhiro Harada Yuzaburo Ban Kousuke Uchiyama 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第1期21-23,共3页
Growth rate has a direct impact on the productivity of nitride LED production. Atmospheric pressure growth of GaN with a growth rate as high as 10/zm/h and also Alo.lGao.gN growth of 1μm/h by using 4 inch by 11 produ... Growth rate has a direct impact on the productivity of nitride LED production. Atmospheric pressure growth of GaN with a growth rate as high as 10/zm/h and also Alo.lGao.gN growth of 1μm/h by using 4 inch by 11 production scale MOVPE are described. XRD of (002) and (102) direction was 200 arcsec and 250 arcsec, respectively. Impact of the growth rate on productivity is discussed. 展开更多
关键词 MOVPE GaN: AlGaN atmospheric pressure growth high growth rate
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