Solid-state nanopores with controllable pore size and morphology have huge application potential.However,it has been very challenging to process sub-10 nm silicon nanopore arrays with high efficiency and high quality ...Solid-state nanopores with controllable pore size and morphology have huge application potential.However,it has been very challenging to process sub-10 nm silicon nanopore arrays with high efficiency and high quality at low cost.In this study,a method combining metal-assisted chemical etching and machine learning is proposed to fabricate sub-10 nm nanopore arrays on silicon wafers with various dopant types and concentrations.Through a SVM algorithm,the relationship between the nanopore structures and the fabrication conditions,including the etching solution,etching time,dopant type,and concentration,was modeled and experimentally verified.Based on this,a processing parameter window for generating regular nanopore arrays on silicon wafers with variable doping types and concentrations was obtained.The proposed machine-learning-assisted etching method will provide a feasible and economical way to process high-quality silicon nanopores,nanostructures,and devices.展开更多
Constraining the processes of deformation during tectonic switching from compression to extension is difficult because of the scarcity or absence of associated sedimentary and magmatic rocks and weak metamorphism.The ...Constraining the processes of deformation during tectonic switching from compression to extension is difficult because of the scarcity or absence of associated sedimentary and magmatic rocks and weak metamorphism.The east margin of the eastern North China Craton experienced Early to Middle Jurassic compression and Early Cretaceous extension.However,the period of tectonic quiescence lasting~13 million years(between 153 and 140 Ma)during which this transition occurred is poorly understood.This paper reports the identification of small-scale N-S-trending thrust and sinistral strike-slip faults(TSS)and NWtrending thrust and dextral strike-slip faults(TDS)in the Tongyuanpu-Aiyang region,which is part of the northern Liaodong Peninsula.Calculation of the tectonic stress field using striations,fault planes and kinematics reveals a NW-SE-oriented maximum principal axis(σ1),and sub-horizontalσ2 andσ3.Assemblages of N-S-trending TSS and NW-trending TDS were arranged with right stepping and resulted in local uplift and erosion at the junctions between fault terminations,which partitioned the Early and Middle Jurassic basins into residual smaller volcanic-sedimentary basins.These basins were unconformably overlain by small Early Cretaceous volcanic-sedimentary basins,such as those at Tongyuanpu and Fangjiaweizi.Magmatic ages and the timing of basin formation constrain the initiation of tectonic switching to 156–153 Ma,and its termination to 140–139 Ma.We suggest that R-R’Riedel shears controlled the formation of the N-S-trending TSS and NW-trending TDS.The R-R’shears were produced by continued sinistral strike-slip and northward growth along the Bohai Bay segment of the Tan-Lu fault zone during the Late Jurassic to early Early Cretaceous,simultaneous with a gradual weakening in the tectonic stress field during a switch in the direction of subduction of the Palaeo-Pacific plate from NW-ward to NNW-ward.This tectonic switching might have promoted the dissolution of gold and migration of gold-bearing fluids.展开更多
基金supported by the National Natural Science Foundation of China[Grant Nos.51975127,U20A6004]the Guangdong-Hong Kong Technology Coopeartion[Grant No.GHP/112/19GD]from Hong Kong Innovation and Technology Commission+1 种基金Research and Development Program of Guangdong Province[Grant No.2020A0505140008]the Fund of Key-Area Research and Development Program of Guangdong Province[Grant No.2018B090906002]。
文摘Solid-state nanopores with controllable pore size and morphology have huge application potential.However,it has been very challenging to process sub-10 nm silicon nanopore arrays with high efficiency and high quality at low cost.In this study,a method combining metal-assisted chemical etching and machine learning is proposed to fabricate sub-10 nm nanopore arrays on silicon wafers with various dopant types and concentrations.Through a SVM algorithm,the relationship between the nanopore structures and the fabrication conditions,including the etching solution,etching time,dopant type,and concentration,was modeled and experimentally verified.Based on this,a processing parameter window for generating regular nanopore arrays on silicon wafers with variable doping types and concentrations was obtained.The proposed machine-learning-assisted etching method will provide a feasible and economical way to process high-quality silicon nanopores,nanostructures,and devices.
基金supported by the National Key R&D Program of China(Grant No.2016YFC0600102)the National Natural Science Foundation of China(Grant No.42030306)the 111 Project of the Ministry of Science and Technology,China(Grant No.BP0719021)。
文摘Constraining the processes of deformation during tectonic switching from compression to extension is difficult because of the scarcity or absence of associated sedimentary and magmatic rocks and weak metamorphism.The east margin of the eastern North China Craton experienced Early to Middle Jurassic compression and Early Cretaceous extension.However,the period of tectonic quiescence lasting~13 million years(between 153 and 140 Ma)during which this transition occurred is poorly understood.This paper reports the identification of small-scale N-S-trending thrust and sinistral strike-slip faults(TSS)and NWtrending thrust and dextral strike-slip faults(TDS)in the Tongyuanpu-Aiyang region,which is part of the northern Liaodong Peninsula.Calculation of the tectonic stress field using striations,fault planes and kinematics reveals a NW-SE-oriented maximum principal axis(σ1),and sub-horizontalσ2 andσ3.Assemblages of N-S-trending TSS and NW-trending TDS were arranged with right stepping and resulted in local uplift and erosion at the junctions between fault terminations,which partitioned the Early and Middle Jurassic basins into residual smaller volcanic-sedimentary basins.These basins were unconformably overlain by small Early Cretaceous volcanic-sedimentary basins,such as those at Tongyuanpu and Fangjiaweizi.Magmatic ages and the timing of basin formation constrain the initiation of tectonic switching to 156–153 Ma,and its termination to 140–139 Ma.We suggest that R-R’Riedel shears controlled the formation of the N-S-trending TSS and NW-trending TDS.The R-R’shears were produced by continued sinistral strike-slip and northward growth along the Bohai Bay segment of the Tan-Lu fault zone during the Late Jurassic to early Early Cretaceous,simultaneous with a gradual weakening in the tectonic stress field during a switch in the direction of subduction of the Palaeo-Pacific plate from NW-ward to NNW-ward.This tectonic switching might have promoted the dissolution of gold and migration of gold-bearing fluids.