As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-g...As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.展开更多
The significance of vacuum measurement technology is increasingly prominent in China’s thriving space industry.Lanzhou Institute of Physics(LIP)has been dedicated to the development of payloads and space-related vacu...The significance of vacuum measurement technology is increasingly prominent in China’s thriving space industry.Lanzhou Institute of Physics(LIP)has been dedicated to the development of payloads and space-related vacuum technology for decades,and widely participated in China’s space programs.In this paper,we present several payloads carried on satellites,spaceships,and space stations;the methodologies of which covered the fields of total and partial pressure measurement,vacuum and pressure leak detection,and standard gas inlet technology.Then,we introduce the corresponding calibration standards developed in LIP,which guaranteed the detection precision of these payloads.This review also provides some suggestions and expectations for the future development and application of vacuum measurement technology in space exploration.展开更多
文摘As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.
基金The authors would like to acknowledge the support of the National Natural Science Foundation of China(Grant No.61627805).
文摘The significance of vacuum measurement technology is increasingly prominent in China’s thriving space industry.Lanzhou Institute of Physics(LIP)has been dedicated to the development of payloads and space-related vacuum technology for decades,and widely participated in China’s space programs.In this paper,we present several payloads carried on satellites,spaceships,and space stations;the methodologies of which covered the fields of total and partial pressure measurement,vacuum and pressure leak detection,and standard gas inlet technology.Then,we introduce the corresponding calibration standards developed in LIP,which guaranteed the detection precision of these payloads.This review also provides some suggestions and expectations for the future development and application of vacuum measurement technology in space exploration.