A simple fabrication method of self-aligned ridge waveguides with dielectric side buffers is demonstrated on +Z-cut LiNbO3. The ridge waveguide is fabricated by a combination of the annealed proton exchange process an...A simple fabrication method of self-aligned ridge waveguides with dielectric side buffers is demonstrated on +Z-cut LiNbO3. The ridge waveguide is fabricated by a combination of the annealed proton exchange process and the proton-exchanged wet etching technique.展开更多
文摘A simple fabrication method of self-aligned ridge waveguides with dielectric side buffers is demonstrated on +Z-cut LiNbO3. The ridge waveguide is fabricated by a combination of the annealed proton exchange process and the proton-exchanged wet etching technique.
