This paper introduces a tunable external-cavity diode laser using a MEMS vertical mirror fabricated on a silicon-on-insulator (SOI) wafer. This laser has the merits of simple alignment process, easy integration/packag...This paper introduces a tunable external-cavity diode laser using a MEMS vertical mirror fabricated on a silicon-on-insulator (SOI) wafer. This laser has the merits of simple alignment process, easy integration/packaging, and potentially large wavelength tuning range.展开更多
文摘This paper introduces a tunable external-cavity diode laser using a MEMS vertical mirror fabricated on a silicon-on-insulator (SOI) wafer. This laser has the merits of simple alignment process, easy integration/packaging, and potentially large wavelength tuning range.
