A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.sc...A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.scat tering coefficient on atomic number,and suppresses effectively the relief contrast at the same time.Therefore this new method is very suitable to the composition analysis.展开更多
We present a coaxial detection of the backscattered electrons in SEM. The lens-aperture has been used to filter in energy and focus the backscattered electrons. This particular geometry allows us to eliminate the low ...We present a coaxial detection of the backscattered electrons in SEM. The lens-aperture has been used to filter in energy and focus the backscattered electrons. This particular geometry allows us to eliminate the low energy backscattered electrons and collect the backscattered electrons, which are backscattered close to the incident beam orientation. The main advantage of this geometry is adapted to topographic contrast attenuation and atomic number contrast enhancement. Thus this new SEM is very suitable to analyze the material composition.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.10045001.
文摘A new detection system in scanning electron microscope,which filters in energy and detects the backscattered electrons close to the microscope axis,is described.This technique ameliorates the dependence of the back.scat tering coefficient on atomic number,and suppresses effectively the relief contrast at the same time.Therefore this new method is very suitable to the composition analysis.
基金the National Natural Science Foundation of China!10045001
文摘We present a coaxial detection of the backscattered electrons in SEM. The lens-aperture has been used to filter in energy and focus the backscattered electrons. This particular geometry allows us to eliminate the low energy backscattered electrons and collect the backscattered electrons, which are backscattered close to the incident beam orientation. The main advantage of this geometry is adapted to topographic contrast attenuation and atomic number contrast enhancement. Thus this new SEM is very suitable to analyze the material composition.
