Microengines are regarded as the potential replacements for batteries.Aimed at the unsatisfactory thermal property of silicon used in the combustion chambers,ceramics are chosen as the construction material in this pa...Microengines are regarded as the potential replacements for batteries.Aimed at the unsatisfactory thermal property of silicon used in the combustion chambers,ceramics are chosen as the construction material in this paper.The fabrication process where alumina has been chosen as the microengine material is discussed.Vigorous FEA has been carried out,and it is found that the material satisfies the stress and deformation requirements of the design.Then the alumina fabrication process is described.Soft reusable polydimethylsiloxane(PDMS)moulds are produced from SU-8 resist masters,and alumina microengine parts are produced using the PDMS moulds.Images of the ceramic components show that the fabrication satisfies the design requirements.展开更多
基金Sponsored by the Natural Science Foundation of Heilongjiang Province (Grant No.E2004-06)
文摘Microengines are regarded as the potential replacements for batteries.Aimed at the unsatisfactory thermal property of silicon used in the combustion chambers,ceramics are chosen as the construction material in this paper.The fabrication process where alumina has been chosen as the microengine material is discussed.Vigorous FEA has been carried out,and it is found that the material satisfies the stress and deformation requirements of the design.Then the alumina fabrication process is described.Soft reusable polydimethylsiloxane(PDMS)moulds are produced from SU-8 resist masters,and alumina microengine parts are produced using the PDMS moulds.Images of the ceramic components show that the fabrication satisfies the design requirements.
