We fabricated a three-dimensional microstructured optical waveguide(MOW)in a single-crystal using femtosecond-laser writing and phosphoric acid etching techniques,and observed excellent midinfrared waveguiding perform...We fabricated a three-dimensional microstructured optical waveguide(MOW)in a single-crystal using femtosecond-laser writing and phosphoric acid etching techniques,and observed excellent midinfrared waveguiding performance with low loss of^0.5 d B∕cm.Tracks with a periodic arrangement were written inside the yttrium aluminum garnet(YAG)crystal via femtosecond laser inscription,and then etched by the phosphoric acid(H3 PO4)to form hollow structures.The evolution of the microstructure of tracks was investigated in detail.The function of the MOW was analyzed by different numerical methods,indicating the proposed MOW can effectively operate in quasi-single-mode pattern in the midinfrared wavelength range,which agrees well with our experiment results.展开更多
基金Postdoctoral Foundation of China(2018M653022)National Natural Science Foundation of China(11734012,91850110)We thank Dr.Neng Wang for constructive discussions and Zhen Shang for some help in experiments.
文摘We fabricated a three-dimensional microstructured optical waveguide(MOW)in a single-crystal using femtosecond-laser writing and phosphoric acid etching techniques,and observed excellent midinfrared waveguiding performance with low loss of^0.5 d B∕cm.Tracks with a periodic arrangement were written inside the yttrium aluminum garnet(YAG)crystal via femtosecond laser inscription,and then etched by the phosphoric acid(H3 PO4)to form hollow structures.The evolution of the microstructure of tracks was investigated in detail.The function of the MOW was analyzed by different numerical methods,indicating the proposed MOW can effectively operate in quasi-single-mode pattern in the midinfrared wavelength range,which agrees well with our experiment results.