Nanofabrication has experienced extraordinary progress in the area of lithography-led processes over the last decades,although versatile and adaptable techniques addressing a wide spectrum of materials are still nasce...Nanofabrication has experienced extraordinary progress in the area of lithography-led processes over the last decades,although versatile and adaptable techniques addressing a wide spectrum of materials are still nascent.Scanning probe lithography(SPL)offers the capability to readily pattern sub-100 nm structures on many surfaces;however,the technique does not scale to dense and multi-lengthscale structures.Here,we demonstrate a technique,which we term nanocalligraphy scanning probe lithography(nc-SPL),that overcomes these limitations.Nc-SPL employs an asymmetric tip and exploits its rotational asymmetry to generate structures spanning the micron to nanometer lengthscales through real-time linewidth tuning.Using specialized tip geometries and by precisely controlling the patterning direction,we demonstrate sub-50 nm patterns while simultaneously improving on throughput,tip longevity,and reliability compared to conventional SPL We further show that nc-SPL can be employed in both positive and negative tone patterning modes,in contrast to conventional SPL.This underlines the potential of this technique for processing sensitive surfaces such as 2D materials,which are prone to tip-induced shear or beam-induced damage.展开更多
Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores.However,in its most common form,controlled breakdown creates a single nanopore at an arbitrary location in ...Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores.However,in its most common form,controlled breakdown creates a single nanopore at an arbitrary location in the membrane.Here,we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the membrane.We demonstrate two advantages of this method.First,we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the electrode.Second,we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled breakdown.This new controlled breakdown method provides a path towards the affordable,rapid,and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.展开更多
文摘Nanofabrication has experienced extraordinary progress in the area of lithography-led processes over the last decades,although versatile and adaptable techniques addressing a wide spectrum of materials are still nascent.Scanning probe lithography(SPL)offers the capability to readily pattern sub-100 nm structures on many surfaces;however,the technique does not scale to dense and multi-lengthscale structures.Here,we demonstrate a technique,which we term nanocalligraphy scanning probe lithography(nc-SPL),that overcomes these limitations.Nc-SPL employs an asymmetric tip and exploits its rotational asymmetry to generate structures spanning the micron to nanometer lengthscales through real-time linewidth tuning.Using specialized tip geometries and by precisely controlling the patterning direction,we demonstrate sub-50 nm patterns while simultaneously improving on throughput,tip longevity,and reliability compared to conventional SPL We further show that nc-SPL can be employed in both positive and negative tone patterning modes,in contrast to conventional SPL.This underlines the potential of this technique for processing sensitive surfaces such as 2D materials,which are prone to tip-induced shear or beam-induced damage.
基金J.P.F.thanks the Oxford Australia Scholarship committee and the University of Western Australia for fundingJ.R.Y.was funded by an FCT contract according to DL57/2016,[SFRH/BPD/80071/2011]+6 种基金J.R.Y.’s lab was funded by national funds through FCT-Fundação para a Ciência e a Tecnologia,I.P.,Project MOSTMICRO-ITQB with refs UIDB/04612/2020 and UIDP/04612/2020 and Project PTDC/NAN-MAT/31100/2017J.M.was supported through the UKRI Future Leaders Fellowship,Grant No.MR/S032541/1with in-kind support from the Royal Academy of Engineering.A.P.I.and J.B.E.acknowledge support from BBSRC grant BB/R022429/1,EPSCR grant EP/P011985/1Analytical Chemistry Trust Fund grant 600322/05This project has also received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation programme(Nos.724300 and 875525)O.D.and STEM investigations were supported by the Center for Nanophase Materials Sciences(CNMS)a U.S.Department of Energy,Office of Science User Facility.
文摘Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores.However,in its most common form,controlled breakdown creates a single nanopore at an arbitrary location in the membrane.Here,we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the membrane.We demonstrate two advantages of this method.First,we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the electrode.Second,we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled breakdown.This new controlled breakdown method provides a path towards the affordable,rapid,and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.
