We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture.The division-of-focal-plane concept combines a multiplex...We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture.The division-of-focal-plane concept combines a multiplexed illumination scheme based on Fourier optics together with an integrated telescopic light-field imaging system.Polarization-resolved imaging is achieved using broadband nanostructured plasmonic polarizers as functional pinhole apertures.The recording of polarization and wavelength information on the image sensor is highly interpretable.We also develop a calibration approach based on a customized neural network architecture that can produce calibrated measurements in real-time.As a proof-of-concept demonstration,we use our calibrated system to accurately reconstruct a thin film thickness map from a four-inch wafer.We anticipate that our concept will have utility in metrology,machine vision,computational imaging,and optical computing platforms.展开更多
基金supported by the Samsung Global Outreach Program and the Office of Naval Research under Award Number N00014-16-1-2630EW was supported by the Stanford Graduate Fellowship.Fabrication was performed in part at the Stanford Nanofabrication Facility(SNF)and the Stanford Nano Shared Facilities(SNSF)supported by the National Science Foundation as part of the National Nanotechnology Coordinated Infrastructure under award ECCS-1542152.
文摘We introduce an imaging system that can simultaneously record complete Mueller polarization responses for a set of wavelength channels in a single image capture.The division-of-focal-plane concept combines a multiplexed illumination scheme based on Fourier optics together with an integrated telescopic light-field imaging system.Polarization-resolved imaging is achieved using broadband nanostructured plasmonic polarizers as functional pinhole apertures.The recording of polarization and wavelength information on the image sensor is highly interpretable.We also develop a calibration approach based on a customized neural network architecture that can produce calibrated measurements in real-time.As a proof-of-concept demonstration,we use our calibrated system to accurately reconstruct a thin film thickness map from a four-inch wafer.We anticipate that our concept will have utility in metrology,machine vision,computational imaging,and optical computing platforms.
