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Parylene photonics: a flexible, broadband optical waveguide platform with integrated micromirrors for biointerfaces 被引量:2
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作者 jay w.reddy Maya Lassiter Maysamreza Chamanzar 《Microsystems & Nanoengineering》 EI CSCD 2020年第1期435-448,共14页
Targeted light delivery into biological tissue is needed in applications such as optogenetic stimulation of the brain and in vivo functional or structural imaging of tissue.These applications require very compact,soft... Targeted light delivery into biological tissue is needed in applications such as optogenetic stimulation of the brain and in vivo functional or structural imaging of tissue.These applications require very compact,soft,and flexible implants that minimize damage to the tissue.Here,we demonstrate a novel implantable photonic platform based on a high-density,flexible array of ultracompact(30μm×5μm),low-loss(3.2dB/cm at λ=680 nm,4.1 dB/cm at λ=633 nm,4.9 dB/cm at λ=532 nm,6.1 dB/cm at λ=450 nm)optical waveguides composed of biocompatible polymers Parylene C and polydimethylsiloxane(PDMS).This photonic platform features unique embedded input/output micromirrors that redirect light from the waveguides perpendicularly to the surface of the array for localized,patterned illumination in tissue.This architecture enables the design of a fully flexible,compact integrated photonic system for applications such as in vivo chronic optogenetic stimulation of brain activity. 展开更多
关键词 WAVEGUIDE optical PARYLENE
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