应用于前沿技术节点的集成生产覆盖逐场控制

随着前沿HVM流程节点中不断应用光刻和193nm浸没式多重图形技术,逻辑设备的关键层生产覆盖要求几乎已经达到了扫描仪硬件性能的极限。为了满足HVM生产环境极端覆盖的要求,本次研究调查了前沿技术节点的一个新集成覆盖控制构想,它将运行到运行(R2R)线性或高阶控制回路、周期逐场或每曝光校正(CPE)晶圆流程标记控制回路,以及扫描仪基线控制回路结合,应用到晶圆厂主机APC系统的一个单一集成覆盖控制路径。目标是满足晶圆厂的覆盖性能要求、降低总拥有成本,并提供自由的控制方法。本文将讨论此构想的一个详细实施案例,以及一些初步的结果。

Effects of Momentum Ratio and Weber Number on Spray Half Angles of Liquid Controlled Pintle Injector

一个舵栓注射者为扼杀一台液体火箭引擎并且减少引擎重量是有益的。这研究为液体气体燃料在舵栓注射者的水花特征上以各种各样的注射条件探索动量比率和威伯数字的效果。一张液体表从一张中心舵栓嘴被注射，它被一口煤气的喷气从环形的差距打破。燃料的压力落下，和舵栓洞距离被看作控制变量；使用 0.1 1.0 液体注射作为为压力的一个酒吧落下，为为舵栓洞距离的煤气的喷气和 0.2 1.0 公里的压力落下的 0.010.2 酒吧。分泌物系数在 0.75 公里的舵栓洞距离前线性地被减少然后，系数稍微被增加。水花图象被一个互补金属氧化物半导体照相机与高分辨率捕获。然后，阴影和反映的图象被分析。水花分布被 patternator 从一个舵栓尖端与 50 公里的轴的距离测量。最后，角度有指数地减少的水花一半动量比率由威伯数字划分了的关联。另外，水花一半从水花分发的角度与从捕获的图象测量的那些相比被低估。

Supersonic Cavity Based Combustion with Kerosene/Hydrogen Fuel

A comparative study with kerosene and hydrogen fuel in a model scramjet combustor has been carried out numerically. The effect of fuel-air equivalence ratio on the flow field properties in a cavity based mixing mechanism at a freestream Mach number of 2.08 has been probed. The investigation has been carried out in a two dimensional numerical model where a cavity of length to depth ratio of 2 is mounted on one of the walls of the flow channel. The flow field shock structure is observed to change with the change in fuel-air equivalence ratio. Total pressure loss is observed to depend both on fuel air equivalence ratio and the fuel type. The spread of fuel in the test section shows marked variation with the equivalence ratio. Performance of injector location on the fuel-air mixing is also probed during the course of the investigation.