X-rays are commonly used for inspecting semiconductors. However, excessive radiation dose could damage semiconductors. Therefore, unnecessary exposure needs to be reduced. The ray quality, which is influenced by the t...X-rays are commonly used for inspecting semiconductors. However, excessive radiation dose could damage semiconductors. Therefore, unnecessary exposure needs to be reduced. The ray quality, which is influenced by the tube voltage and filter, determines the exposure. We designed an X-ray tube for inspecting semiconductors with different target/filter combinations and calculated X-ray spectra using the MCNPX （Monte Carlo n-particle extended） code. The target material was W, and the filters were made of Mo, W, and Zr. The W/W combination showed the lowest flux. The MCNPX code can reduce the development time and cost of the target/filter combination for inspecting semiconductors.展开更多
文摘X-rays are commonly used for inspecting semiconductors. However, excessive radiation dose could damage semiconductors. Therefore, unnecessary exposure needs to be reduced. The ray quality, which is influenced by the tube voltage and filter, determines the exposure. We designed an X-ray tube for inspecting semiconductors with different target/filter combinations and calculated X-ray spectra using the MCNPX （Monte Carlo n-particle extended） code. The target material was W, and the filters were made of Mo, W, and Zr. The W/W combination showed the lowest flux. The MCNPX code can reduce the development time and cost of the target/filter combination for inspecting semiconductors.
