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Preparation and characterization of Ti-Zr-V-Cu getter films
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作者 Yuchen Yang Tao Huang +10 位作者 Na wang jia’ou wang Saike Tian Sen Yue Haichang Duan Yongsheng Ma Yu Liu Jun Ren Xiaohua Peng Haiyi Dong Ping He 《Radiation Detection Technology and Methods》 CSCD 2024年第2期1298-1305,共8页
Introduction Non-evaporable getter is now widely employed in many accelerators to mitigate the resistive-wall effect of the Ti-Zr-V getter coated vacuum chambers in the next generation accelerators.Methods and discuss... Introduction Non-evaporable getter is now widely employed in many accelerators to mitigate the resistive-wall effect of the Ti-Zr-V getter coated vacuum chambers in the next generation accelerators.Methods and discussions Quaternary Ti-Zr-V-Cu getter films were deposited by direct current(DC)magnetron sputtering.The DC/high frequency impedance and activation kinetics were investigated by four-probes/waveguide methods and in situ synchrotron radiation photoelectron spectroscopy(SRPES).Conclusions Compared to Ti-Zr-V films,Ti-Zr-V-Cu films showed better conductivity,which is beneficial to eliminate the resistive-wall effect.However,its initial activation temperature is above 200℃,and it needs to be activated at a higher temperature to achieve the required pumping performance. 展开更多
关键词 GETTER NEG TiZrVCu IMPEDANCE CONDUCTIVITY SRPES Pumping speed
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