The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to ach...The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to achieve highest possible dielectric strength of SiN_(x),the process parameters of ICP-CVD were carefully tuned to control hydrogen in SiN_(x) films by means of tuning N_(2)/SiH_(4) ratio and radio frequency(RF) power.Besides electrical measurements,the hydrogen content in the films was measured by dynamic secondary ion mass spectrometry(D-SIMS).Fourier transform infrared spectroscopy(FTIR) and micro Raman spectroscopy were used to characterize the SiN_(x) films by measuring Si-H and N-H bonds’ intensities.It was found that the more Si-H bonds lead to the higher dielectric strength.展开更多
To the Editor:Allergic bronchopulmonary aspergillosis(ABPA)is an allergic lung disease caused by hypersensitivity to antigens from Aspergillus,and it most commonly occurs in patients with asthma or cysticbrosis.[1]The...To the Editor:Allergic bronchopulmonary aspergillosis(ABPA)is an allergic lung disease caused by hypersensitivity to antigens from Aspergillus,and it most commonly occurs in patients with asthma or cysticbrosis.[1]The main clinical characteristics of the disease are those related to elevated serum immunoglubulin(Ig)E level,positive Aspergillus fumigatus(A.fumigatus)specic IgE/IgG,repeated pulmonary inltration,and bronchiectasis.However,due to the lack of unied diagnostic criteria and screening methods,ABPA is always underdiagnosed.In 2021,new diagnostic criteria were proposed for allergic bronchopulmonary mycosis(ABPM)in the Japanese population.展开更多
Conventional wavelength modulation spectroscopy(WMS)is vulnerable to the influence of low-frequency noise.Accuracy of the method highly depends on the performance of the costly lock-in amplifier.In this article,we rep...Conventional wavelength modulation spectroscopy(WMS)is vulnerable to the influence of low-frequency noise.Accuracy of the method highly depends on the performance of the costly lock-in amplifier.In this article,we report a new and effective method for reconstructing second-harmonic signals through WMS based on fast Fourier transform(FFT).This method is less disturbed by low-frequency noise because it does not use a low-frequency ramp wave.Formulation and detection procedures were presented.The discrete second-harmonic waveform can be obtained by continuously changing the DC signal and FFT analysis in this method.Second-harmonic waveforms acquired by the two means are generally consistent.The experimental study validates the obtained gas concentration from 5% to 30%,showing a good linear relationship by the proposed method.The maximum relative error on concentration extraction is 2.87%;as for conventional WMS,this value is 4.50%.The developed measurement method may have potential in computed tomography.展开更多
基金Project supported by the Natural Science Foundation of Jiangsu Higher Education Institutions of China(Grant Nos.19KJD140002 and 19KJB140008)the Key Projects of Ministry of Science and Technology of China(Grant No.SQ2020YFF0407077)+3 种基金Postgraduate Research&Practice Innovation Program of Jiangsu Province,China(Grant Nos.2020XKT786 and KYCX202337)the National Foreign Experts Bureau High-end Foreign Experts Project,China(Grant No.G20190114003)the Key Research and Development Program of Jiangsu Province,China(Grant No.BE2018063)the Scientific Research Program for Doctoral Teachers of JSNU(Grant No.9212218113)。
文摘The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to achieve highest possible dielectric strength of SiN_(x),the process parameters of ICP-CVD were carefully tuned to control hydrogen in SiN_(x) films by means of tuning N_(2)/SiH_(4) ratio and radio frequency(RF) power.Besides electrical measurements,the hydrogen content in the films was measured by dynamic secondary ion mass spectrometry(D-SIMS).Fourier transform infrared spectroscopy(FTIR) and micro Raman spectroscopy were used to characterize the SiN_(x) films by measuring Si-H and N-H bonds’ intensities.It was found that the more Si-H bonds lead to the higher dielectric strength.
基金funded by the National Natural Science Foundation of China(Nos.82270033 and 81873407)the Natural Science Foundation of Hunan province(No.2022JJ30924)
文摘To the Editor:Allergic bronchopulmonary aspergillosis(ABPA)is an allergic lung disease caused by hypersensitivity to antigens from Aspergillus,and it most commonly occurs in patients with asthma or cysticbrosis.[1]The main clinical characteristics of the disease are those related to elevated serum immunoglubulin(Ig)E level,positive Aspergillus fumigatus(A.fumigatus)specic IgE/IgG,repeated pulmonary inltration,and bronchiectasis.However,due to the lack of unied diagnostic criteria and screening methods,ABPA is always underdiagnosed.In 2021,new diagnostic criteria were proposed for allergic bronchopulmonary mycosis(ABPM)in the Japanese population.
基金supported in part by the National Natural Science Foundation of China(Nos.61411130312 and 61308053)Guangdong Provincial Key Laboratory of Semiconductor Micro Display(No.2020B121202003)Foshan Science and Technology Bureau。
文摘Conventional wavelength modulation spectroscopy(WMS)is vulnerable to the influence of low-frequency noise.Accuracy of the method highly depends on the performance of the costly lock-in amplifier.In this article,we report a new and effective method for reconstructing second-harmonic signals through WMS based on fast Fourier transform(FFT).This method is less disturbed by low-frequency noise because it does not use a low-frequency ramp wave.Formulation and detection procedures were presented.The discrete second-harmonic waveform can be obtained by continuously changing the DC signal and FFT analysis in this method.Second-harmonic waveforms acquired by the two means are generally consistent.The experimental study validates the obtained gas concentration from 5% to 30%,showing a good linear relationship by the proposed method.The maximum relative error on concentration extraction is 2.87%;as for conventional WMS,this value is 4.50%.The developed measurement method may have potential in computed tomography.
