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Reliability testing of a 3D encapsulated VHF MEMS resonator
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作者 Fengxiang Wang Quan Yuan +4 位作者 Xiao Kan jicong zhao Zeji Chen Jinling Yang Fuhua Yang 《Journal of Semiconductors》 EI CAS CSCD 2018年第10期64-67,共4页
The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitanc... The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃. 展开更多
关键词 3D encapsulation VHF disk resonator frequency stability parasitic effect
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