With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aer...With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bear- ings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.展开更多
基金supported by the National Basic Research and Development Program of China (Grant No. 2009CB724205)the National Natural Science Foundation of China (Grant Nos. 51121002, 51175196)
文摘With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bear- ings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.