Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner.Traditional stacked stage method works effectively only in a local,limited ...Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner.Traditional stacked stage method works effectively only in a local,limited range,and vibration coupling is also challenging.Here,we design a dual mechanism multimodal linear actuator(DMMLA)consisted of piezoelectric and electromagnetic costator and coslider for producing macro-,micro-,and nanomotion,respectively.A DMMLA prototype is fabricated,and each working mode is validated separately,confirming its fast motion(0~50 mm/s)in macromotion mode,micromotion(0~135μm/s)and nanomotion(minimum step:0~2 nm)in piezoelectric step and servomotion modes.The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.展开更多
Electric field(E-field)control of magnetism based on magnetoelectric coupling is one of the promising approaches for manipulating the magnetization with low power consumption.The evolution of magnetic domains under in...Electric field(E-field)control of magnetism based on magnetoelectric coupling is one of the promising approaches for manipulating the magnetization with low power consumption.The evolution of magnetic domains under in-situ E-fields is significant for the practical applications in integrated micro/nano devices.Here,we report the vector analysis of the E-field-driven antiparallel magnetic domain evolution in FeCoSiB/PMN-PT(011)multiferroic heterostructures via in-situ quantitative magneto-optical Kerr microscope.It is demonstrated that the magnetic domains can be switched to both the 0°and 180°easy directions at the same time by E-fields,resulting in antiparallel magnetization distribution in ferromagnetic/ferroelectric heterostructures.This antiparallel magnetic domain evolution is attributed to energy minimization with the uniaxial strains by E-fields which can induce the rotation of domains no more than 90°.Moreover,domains can be driven along only one or both easy axis directions by reasonably selecting the initial magnetic domain distribution.The vector analysis of magnetic domain evolution can provide visual insights into the strain-mediated magnetoelectric effect,and promote the fundamental understanding of electrical regulation of magnetism.展开更多
Piezoelectric ceramics exhibit three conventional piezoelectric coefficients,i.e.,d33,d31,d15,due to their∞mm crystal symmetry.Unconventional piezoelectric coefficients,such as d11,d12,d13,d14,d16,etc.,can only be ex...Piezoelectric ceramics exhibit three conventional piezoelectric coefficients,i.e.,d33,d31,d15,due to their∞mm crystal symmetry.Unconventional piezoelectric coefficients,such as d11,d12,d13,d14,d16,etc.,can only be extracted from piezoelectric single crystals of special symmetry with specific cut direction.Here we demonstrate a rotated poling method to realize unconventional piezoelectric coefficients in perovskite piezoelectric ceramics.This method is elaborated in theory and experimentally proven to be effective.Full nonzero piezoelectric coefficients in the 36 piezoelectric coefficients matrix can be obtained by combining these“quasi(effective)piezoelectric coefficients”with the conventional piezoelectric coefficients,which would expand applications in a wide variety of piezoelectric devices.展开更多
基金This work was supported by the National Natural Science Foundation of China(Grant Nos.51772005 and 51072003)Beijing Key Laboratory for Magnetoeletric Materials and Devices.
文摘Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner.Traditional stacked stage method works effectively only in a local,limited range,and vibration coupling is also challenging.Here,we design a dual mechanism multimodal linear actuator(DMMLA)consisted of piezoelectric and electromagnetic costator and coslider for producing macro-,micro-,and nanomotion,respectively.A DMMLA prototype is fabricated,and each working mode is validated separately,confirming its fast motion(0~50 mm/s)in macromotion mode,micromotion(0~135μm/s)and nanomotion(minimum step:0~2 nm)in piezoelectric step and servomotion modes.The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.
基金supported by the National Key R&D Program of China(2018YFB0407601)the National Natural Science Foundation of China(91964109,62071374 and 51802248)the National 111 Project of China(B14040).
基金supported by the National Key R&D Program of China(Grant No.2018YFB0407601)the National Natural Science Foundation of China(Grant Nos.91964109,62071374,and 51802248)+1 种基金the National 111 Project of China(Grant No.B14040)the Fundamental Research Funds for the Central Universities(Grant No.xxj022020008).
文摘Electric field(E-field)control of magnetism based on magnetoelectric coupling is one of the promising approaches for manipulating the magnetization with low power consumption.The evolution of magnetic domains under in-situ E-fields is significant for the practical applications in integrated micro/nano devices.Here,we report the vector analysis of the E-field-driven antiparallel magnetic domain evolution in FeCoSiB/PMN-PT(011)multiferroic heterostructures via in-situ quantitative magneto-optical Kerr microscope.It is demonstrated that the magnetic domains can be switched to both the 0°and 180°easy directions at the same time by E-fields,resulting in antiparallel magnetization distribution in ferromagnetic/ferroelectric heterostructures.This antiparallel magnetic domain evolution is attributed to energy minimization with the uniaxial strains by E-fields which can induce the rotation of domains no more than 90°.Moreover,domains can be driven along only one or both easy axis directions by reasonably selecting the initial magnetic domain distribution.The vector analysis of magnetic domain evolution can provide visual insights into the strain-mediated magnetoelectric effect,and promote the fundamental understanding of electrical regulation of magnetism.
基金support by the Fundamental Research Funds for the Central Universities.This work was supported by the National Key R&D Program of China(Grant No.2018YFB0407601)the Natural Science Foundation of China(Grant Nos.91964109,51802248,and 11534015)+1 种基金China Postdoctoral Science Foundation(Grant No.2019M653605)the National 111 Project of China(B14040).
文摘Piezoelectric ceramics exhibit three conventional piezoelectric coefficients,i.e.,d33,d31,d15,due to their∞mm crystal symmetry.Unconventional piezoelectric coefficients,such as d11,d12,d13,d14,d16,etc.,can only be extracted from piezoelectric single crystals of special symmetry with specific cut direction.Here we demonstrate a rotated poling method to realize unconventional piezoelectric coefficients in perovskite piezoelectric ceramics.This method is elaborated in theory and experimentally proven to be effective.Full nonzero piezoelectric coefficients in the 36 piezoelectric coefficients matrix can be obtained by combining these“quasi(effective)piezoelectric coefficients”with the conventional piezoelectric coefficients,which would expand applications in a wide variety of piezoelectric devices.