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基于AFM的纳米尺度线宽计量模型及其算法的研究 被引量:7
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作者 赵学增 褚巍 +3 位作者 Theodore V Vorburger Joseph Fu john song Cattien V Nguyen 《机械工程学报》 EI CAS CSCD 北大核心 2004年第4期50-57,共8页
纳米尺度线宽的测量广泛应用于半导体制造、数据存储、微机电系统等领域。随着制造技术的进步,线宽的极限尺寸也变得越来越小,目前已经缩小至100 nm左右。在这一尺度范围内,由于样本制造技术的限制和测量仪器的影响,目前很难得到准确的... 纳米尺度线宽的测量广泛应用于半导体制造、数据存储、微机电系统等领域。随着制造技术的进步,线宽的极限尺寸也变得越来越小,目前已经缩小至100 nm左右。在这一尺度范围内,由于样本制造技术的限制和测量仪器的影响,目前很难得到准确的测量结果。为了获得样本的真实几何尺寸信息,剔除测量方法和仪器本身对测量结果的影响,建立了一个基于AFM测量技术的线宽计量模型和相应算法。该模型将被测样本的截面轮廓用20个关键点分成5个部分共19段,用基于最小二乘的直线来拟合实际轮廓。应用该模型和算法可以分别得到单刻线轮廓拟合前后的顶部线宽b_T、b_(TF),中部线宽b_M、b_(MF),底部线宽b_B、b_(BF),左右边墙角A_L、A_R,以及高度h_。使用NanoScope Ⅲa型AFM对一个单晶硅(Si)线宽样本进行了测量,测量结果表明该模型和算法可以满足纳米尺度线宽计量的基本要求。 展开更多
关键词 纳米计量 线宽 计量模型 算法 原子力显微镜 半导体 数据存储 微机电系统
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Protein sequence analysis based on hydropathy profile of amino acids
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作者 Xiao-li XIE Li-fei ZHENG +4 位作者 Ying YU Li-ping LIANG Man-cai GUO john song Zhi-fa YUAN 《Journal of Zhejiang University-Science B(Biomedicine & Biotechnology)》 SCIE CAS CSCD 2012年第2期152-158,共7页
Biology sequence comparison is a fundamental task in computational biology.According to the hydropathy profile of amino acids,a protein sequence is taken as a string with three letters.Three curves of the new protein ... Biology sequence comparison is a fundamental task in computational biology.According to the hydropathy profile of amino acids,a protein sequence is taken as a string with three letters.Three curves of the new protein sequence were defined to describe the protein sequence.A new method to analyze the similarity/dissimilarity of protein sequence was proposed based on the conditional probability of the protein sequence.Finally,the protein sequences of ND6(NADH dehydrogenase subunit 6)protein of eight species were taken as an example to illustrate the new approach.The results demonstrated that the method is convenient and efficient. 展开更多
关键词 Protein sequence Sequence comparison Similarity/dissimilarity Conditional probability
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Religious Studies in 20th Century China
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作者 john song 《哲学门》 2004年第S01期282-291,共10页
Part One,The First Hale of the 20th Century in Retrospect Although China is not a civilization or country without traditional religions,and although she has a long history of interactions between indigenous and foreig... Part One,The First Hale of the 20th Century in Retrospect Although China is not a civilization or country without traditional religions,and although she has a long history of interactions between indigenous and foreign religions,such as Buddhism,Islam,Judaism,and Christianity,she had not known very much about the study of religion as a modem science until some of her young sons and daughters returned from the West with degrees in religious studies in the early part of 20th century. 展开更多
关键词 RELIGIOUS DAUGHTER MODEM
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