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Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching 被引量:18
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作者 jun-xia zhou Ren-hong Gao +9 位作者 Jintian Lin Min Wang Wei Chu Wen-bo Li Di-feng Yin Li Deng Zhi-wei Fang Jian-hao Zhang Rong-bo Wu and Ya Cheng 《Chinese Physics Letters》 SCIE CAS CSCD 2020年第8期43-47,共5页
Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-opti... Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-optically switchable OTDLs on lithium niobate on insulator using photolithography assisted chemo-mechanical etching.Our device consists of several low-loss optical waveguides of different lengths which are consecutively connected by electro-optical switches to generate different amounts of time delay.The fabricated OTLDs show an ultra-low propagation loss of^0.03dB/cm for waveguide lengths well above 100 cm. 展开更多
关键词 lithography waveguide tuning
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