1
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A Generalized Analytical Model of a Multispecies Plasma Immersion Ion Implantation Process in a Collisionless System |
Dushyant Gupta
B. Prasad
jyotika jogi
P.J. George
|
《材料科学与工程(中英文B版)》
|
2011 |
1
|
|
2
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A Comparative Study of Dynamic Sheath Analytical Models of a Multispecies Plasma Immersion Ion Implantation System in Collisionless Regime |
Dushyant Gupta
jyotika jogi
P.J. George
|
《材料科学与工程(中英文B版)》
|
2013 |
0 |
|