We report on the first observation of the neutron-rich nucleus^(131)Ag.This isotope was produced via fragmentation reactions of intense secondary radioactive ion beams,including 134,135Sn.The secondary beams were prod...We report on the first observation of the neutron-rich nucleus^(131)Ag.This isotope was produced via fragmentation reactions of intense secondary radioactive ion beams,including 134,135Sn.The secondary beams were produced from induced fission reactions from a stable 238U beam at 345 MeV/nucleon.Secondary reaction residues were selected by the ZeroDegree spectrometer and identified by measuring their magnetic rigidity,time of flight,energy loss,and total kinetic energy.展开更多
The fatigue properties of nickel-base Alloy 718 with fine- and grain-coarse grains were investigated. In the fine-grain alloy, the fatigue strength normalized by the tensile strength was 0.51 at 107 cycles. In contras...The fatigue properties of nickel-base Alloy 718 with fine- and grain-coarse grains were investigated. In the fine-grain alloy, the fatigue strength normalized by the tensile strength was 0.51 at 107 cycles. In contrast, the fatigue strength of the coarse-grain alloy was 0.32 at the same cycles, although the fatigue strengths in the range from 103 to 105 cycles are the same for both alloys. The fracture appearances fatigued at around 106 cycles showed internal fractures originating from the flat facets of austenite grains for both alloys. The difference in fatigue strength at 107 cycles between the fine- and coarse-grain alloys could be explained in terms of the sizes of the facets from which the fractures originated.展开更多
As interconnects shrink beyond 90nm node, the presence of etch residues can createhigh via resistance and void nucleation during stress migration (SM) testing. Physical Ar+ preclean is effectivein removing residues, b...As interconnects shrink beyond 90nm node, the presence of etch residues can createhigh via resistance and void nucleation during stress migration (SM) testing. Physical Ar+ preclean is effectivein removing residues, but early SM failures have been seen due to Cu resputter from underlying trenches.Reactive preclean methods show promise in reducing CuOx and cleaning Si, N, F, C,O etch residues inpresence of H+, H* species. In this paper, reactive preclean and PVD PunchThru process (deposit-etch-deposit) is proposed as solution to conventional PVD.The PunchThru process reduces via resistance, improves SM and protects dual-damascene beveland unlanded vias from Cu diffusion by presence of thin Ta deposition step. In addition, the U-shaped interface,which minimizes electron crowding and localized heating effects, increases the mean time to failureby electromigration. Consistent, repeatable blanket film property and good parametric electrical test resultshave proven the production worthiness of this process.展开更多
At RIKEN,three ECR ion sources（10GHz ECRIS,18GHz ECRIS and liquid He-free SC-ECRIS） are operated as external ion sources of heavy ion accelerators.In the last year,multi-charged uranium ion beam was produced from 18...At RIKEN,three ECR ion sources（10GHz ECRIS,18GHz ECRIS and liquid He-free SC-ECRIS） are operated as external ion sources of heavy ion accelerators.In the last year,multi-charged uranium ion beam was produced from 18GHz ECRIS by using UF<sub>6</sub> and the <sup>238</sup>U ion was successfully accelerated by the accelerator complex which consists of the RFQ linear accelerator,RIKEN heavy ion linear accelerator（RILAC）and RIKEN ring cyclotron accelerator（RRC）.The typical beam intensity of<sup>238</sup>U<sup>14+</sup> was about 2pμA on faraday cup after analysing magnet.<sup>70</sup>Zn beam was still supplied for the new super-heavy element search experiment with insertion method.Intense beam of<sup>70</sup>Zn<sup>16+</sup> was produced for long term（～43 days）without vacuum break and remarkably low material consumption rate（～100μgr/h）.We already supplied Zn beam longer than 200 days for this experiment.<sup>48</sup>Ca ion was also produced by insertion method using<sup>48</sup>CaO rod for the nuclear physics experiment.In this contribution,we will present ion source parameter and techniques for production of each of the metal ions.展开更多
基金the National Basic Research Program of China under Grant No 2013CB834402the National Natural Science Foundation of China under Grant Nos 11035001 and 11275011.
文摘We report on the first observation of the neutron-rich nucleus^(131)Ag.This isotope was produced via fragmentation reactions of intense secondary radioactive ion beams,including 134,135Sn.The secondary beams were produced from induced fission reactions from a stable 238U beam at 345 MeV/nucleon.Secondary reaction residues were selected by the ZeroDegree spectrometer and identified by measuring their magnetic rigidity,time of flight,energy loss,and total kinetic energy.
文摘The fatigue properties of nickel-base Alloy 718 with fine- and grain-coarse grains were investigated. In the fine-grain alloy, the fatigue strength normalized by the tensile strength was 0.51 at 107 cycles. In contrast, the fatigue strength of the coarse-grain alloy was 0.32 at the same cycles, although the fatigue strengths in the range from 103 to 105 cycles are the same for both alloys. The fracture appearances fatigued at around 106 cycles showed internal fractures originating from the flat facets of austenite grains for both alloys. The difference in fatigue strength at 107 cycles between the fine- and coarse-grain alloys could be explained in terms of the sizes of the facets from which the fractures originated.
文摘As interconnects shrink beyond 90nm node, the presence of etch residues can createhigh via resistance and void nucleation during stress migration (SM) testing. Physical Ar+ preclean is effectivein removing residues, but early SM failures have been seen due to Cu resputter from underlying trenches.Reactive preclean methods show promise in reducing CuOx and cleaning Si, N, F, C,O etch residues inpresence of H+, H* species. In this paper, reactive preclean and PVD PunchThru process (deposit-etch-deposit) is proposed as solution to conventional PVD.The PunchThru process reduces via resistance, improves SM and protects dual-damascene beveland unlanded vias from Cu diffusion by presence of thin Ta deposition step. In addition, the U-shaped interface,which minimizes electron crowding and localized heating effects, increases the mean time to failureby electromigration. Consistent, repeatable blanket film property and good parametric electrical test resultshave proven the production worthiness of this process.
文摘At RIKEN,three ECR ion sources（10GHz ECRIS,18GHz ECRIS and liquid He-free SC-ECRIS） are operated as external ion sources of heavy ion accelerators.In the last year,multi-charged uranium ion beam was produced from 18GHz ECRIS by using UF<sub>6</sub> and the <sup>238</sup>U ion was successfully accelerated by the accelerator complex which consists of the RFQ linear accelerator,RIKEN heavy ion linear accelerator（RILAC）and RIKEN ring cyclotron accelerator（RRC）.The typical beam intensity of<sup>238</sup>U<sup>14+</sup> was about 2pμA on faraday cup after analysing magnet.<sup>70</sup>Zn beam was still supplied for the new super-heavy element search experiment with insertion method.Intense beam of<sup>70</sup>Zn<sup>16+</sup> was produced for long term（～43 days）without vacuum break and remarkably low material consumption rate（～100μgr/h）.We already supplied Zn beam longer than 200 days for this experiment.<sup>48</sup>Ca ion was also produced by insertion method using<sup>48</sup>CaO rod for the nuclear physics experiment.In this contribution,we will present ion source parameter and techniques for production of each of the metal ions.
