Ultra-high-quality-factor(Q)resonators are a critical component for visible to near-infrared(NIR)applications,including quantum sensing and computation,atomic timekeeping and navigation,precision metrology,microwave p...Ultra-high-quality-factor(Q)resonators are a critical component for visible to near-infrared(NIR)applications,including quantum sensing and computation,atomic timekeeping and navigation,precision metrology,microwave photonics,and fiber optic sensing and communications.Implementing such resonators in an ultra-low-loss CMOS foundry compatible photonic integration platform can enable the transitioning of critical components from the lab-to the chip-scale,such as ultra-low-linewidth lasers,optical reference cavities,scanning spectroscopy,and precision filtering.The optimal operation of these resonators must preserve the ultra-low losses and simultaneously support the desired variations in coupling over a wide range of visible and NIR wavelengths as well as provide tolerance to fabrication imperfections.We report a significant advancement in high-performance integrated resonators based on a two-point-coupling design that achieves critical coupling simultaneously at multiple wavelengths across wide wavebands and tuning of the coupling condition at any wavelength,from under-,through critically,to over-coupled.We demonstrate critical coupling at 698 nm and 780 nm in one visible-wavelength resonator and critical coupling over a wavelength range from 1550 nm to 1630 nm in a 340-million intrinsic Q 10-meter-coil waveguide resonator.Using the 340-million intrinsic Q coil resonator,we demonstrate laser stabilization that achieves six orders of magnitude reduction in the semiconductor laser frequency noise.We also report that this design can be used as a characterization technique to measure the intrinsic waveguide losses from 1300 nm to 1650 nm,resolving hydrogen-related absorption peaks at 1380 nm and 1520 nm in the resonator,giving insight to further reduce waveguide loss.The CMOS foundry compatibility of this resonator design will provide a path towards scalable system-on-chip integration for high-performance precision experiments and applications,improving reliability,and reducing size and cost.展开更多
基金DARPA Microsystems Technology Office(HR0011-22-2-0008)Army Research Office(W911NF-23-1-0179).
文摘Ultra-high-quality-factor(Q)resonators are a critical component for visible to near-infrared(NIR)applications,including quantum sensing and computation,atomic timekeeping and navigation,precision metrology,microwave photonics,and fiber optic sensing and communications.Implementing such resonators in an ultra-low-loss CMOS foundry compatible photonic integration platform can enable the transitioning of critical components from the lab-to the chip-scale,such as ultra-low-linewidth lasers,optical reference cavities,scanning spectroscopy,and precision filtering.The optimal operation of these resonators must preserve the ultra-low losses and simultaneously support the desired variations in coupling over a wide range of visible and NIR wavelengths as well as provide tolerance to fabrication imperfections.We report a significant advancement in high-performance integrated resonators based on a two-point-coupling design that achieves critical coupling simultaneously at multiple wavelengths across wide wavebands and tuning of the coupling condition at any wavelength,from under-,through critically,to over-coupled.We demonstrate critical coupling at 698 nm and 780 nm in one visible-wavelength resonator and critical coupling over a wavelength range from 1550 nm to 1630 nm in a 340-million intrinsic Q 10-meter-coil waveguide resonator.Using the 340-million intrinsic Q coil resonator,we demonstrate laser stabilization that achieves six orders of magnitude reduction in the semiconductor laser frequency noise.We also report that this design can be used as a characterization technique to measure the intrinsic waveguide losses from 1300 nm to 1650 nm,resolving hydrogen-related absorption peaks at 1380 nm and 1520 nm in the resonator,giving insight to further reduce waveguide loss.The CMOS foundry compatibility of this resonator design will provide a path towards scalable system-on-chip integration for high-performance precision experiments and applications,improving reliability,and reducing size and cost.
