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沉积参数对磁控溅射CrN_x膜结构和性能的影响
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作者 李永良 kim sunkyu 《现代仪器》 2010年第1期22-24,共3页
本文采用非平衡直流磁控溅射方法制备CrN_x薄膜,研究沉积参数对膜结构和性能的影响。结果表明沉积过程中增加N_2的分压,薄膜的组成由Cr_2N相转变成CrN相,膜的表面形貌也由胞状转化为正四面体。增加样品台的负偏压,沉积膜层更加致密,表... 本文采用非平衡直流磁控溅射方法制备CrN_x薄膜,研究沉积参数对膜结构和性能的影响。结果表明沉积过程中增加N_2的分压,薄膜的组成由Cr_2N相转变成CrN相,膜的表面形貌也由胞状转化为正四面体。增加样品台的负偏压,沉积膜层更加致密,表面更加平坦。 展开更多
关键词 直流磁控溅射 CrNx膜 沉积参数 结构与性能
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Microstructural and tribological behavior of TiAlN/MoS_2-Ti coatings 被引量:10
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作者 LI Yongliang kim sunkyu 《Rare Metals》 SCIE EI CAS CSCD 2006年第4期326-330,共5页
A TIA1N/MoS2-Ti coating was developed to improve the tribological characteristics of a single TiAlN coating. The MoS2-Ti layer was deposited by a DC magnetron sputtering system on the hard TiAIN coated SKD-11 steel su... A TIA1N/MoS2-Ti coating was developed to improve the tribological characteristics of a single TiAlN coating. The MoS2-Ti layer was deposited by a DC magnetron sputtering system on the hard TiAIN coated SKD-11 steel substrate. The titanium content in the MoS2-Ti layer was 11.3 at.% determined by EPMA. The surface morphology was observed by FE-SEM. The TiAlN layer exhibited excellent adhesion and hardness. However, the deposition of an MoS2-Zi layer on the TRAIN led to a significant improvement in tribological properties without affecting the adhesion to the substrate. The MoS2-Ti layer significantly decreased the friction coefficient of the TiAIN coating, and the drop was 48% after MoS2-Ti deposition. Also, the MoS2-Ti layer remarkably decreased the wear rate of the TtA1N coating. 展开更多
关键词 TiAIN/MoS2-Ti coating surface morphology tribological properties HARDNESS
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