We have successfully demonstrated a 1 Kb spin-orbit torque(SOT)magnetic random-access memory(MRAM)multiplexer(MUX)array with remarkable performance.The 1 Kb MUX array exhibits an in-die function yield of over 99.6%.Ad...We have successfully demonstrated a 1 Kb spin-orbit torque(SOT)magnetic random-access memory(MRAM)multiplexer(MUX)array with remarkable performance.The 1 Kb MUX array exhibits an in-die function yield of over 99.6%.Additionally,it provides a sufficient readout window,with a TMR/RP_sigma%value of 21.4.Moreover,the SOT magnetic tunnel junctions(MTJs)in the array show write error rates as low as 10^(-6)without any ballooning effects or back-hopping behaviors,ensuring the write stability and reliability.This array achieves write operations in 20 ns and 1.2 V for an industrial-level temperature range from-40 to 125℃.Overall,the demonstrated array shows competitive specifications compared to the state-of-the-art works.Our work paves the way for the industrial-scale production of SOT-MRAM,moving this technology beyond R&D and towards widespread adoption.展开更多
We demonstrate in-plane field-free-switching spin-orbit torque(SOT)magnetic tunnel junction(MTJ)devices that are capable of low switching current density,fast speed,high reliability,and,most importantly,manufactured u...We demonstrate in-plane field-free-switching spin-orbit torque(SOT)magnetic tunnel junction(MTJ)devices that are capable of low switching current density,fast speed,high reliability,and,most importantly,manufactured uniformly by the 200-mm-wafer platform.The performance of the devices is systematically studied,including their magnetic properties,switch-ing behaviors,endurance and data retention.The successful integration of SOT devices within the 200-mm-wafer manufactur-ing platform provides a feasible way to industrialize SOT MRAMs.It is expected to obtain excellent performance of the devices by further optimizing the MTJ film stacks and the corresponding fabrication processes in the future.展开更多
Chiral magnetic skyrmions are topological swirling spin textures that hold promise for future information technology. The electrical nucleation and motion of skyrmions have been experimentally demonstrated in the last...Chiral magnetic skyrmions are topological swirling spin textures that hold promise for future information technology. The electrical nucleation and motion of skyrmions have been experimentally demonstrated in the last decade, while electrical detection compatible with semiconductor processes has not been achieved, and this is considered one of the most crucial gaps regarding the use of skyrmions in real applications. Here, we report the direct observation of nanoscale skyrmions in Co Fe B/Mg O-based magnetic tunnel junction devices at room temperature. High-resolution magnetic force microscopy imaging and tunneling magnetoresistance measurements are used to illustrate the electrical detection of skyrmions,which are stabilized under the cooperation of interfacial Dzyaloshinskii–Moriya interaction, perpendicular magnetic anisotropy, and dipolar stray field. This skyrmionic magnetic tunnel junction shows a stable nonlinear multilevel resistance thanks to its topological nature and tunable density of skyrmions under current pulse excitation. These features provide important perspectives for spintronics to realize highdensity memory and neuromorphic computing.展开更多
The current-induced spin-orbit torque(SOT) is one of the most promising ways for high speed and low power spintronics devices. However, the mechanism of SOT driven magnetization reversal, especially the role of the fi...The current-induced spin-orbit torque(SOT) is one of the most promising ways for high speed and low power spintronics devices. However, the mechanism of SOT driven magnetization reversal, especially the role of the field-like torque(FLT), is still unclear. Here, we report the observed promotion and suppression of switching by FLT, which depends on the relative direction of FLT and spin polarization. Our results reveal that the FLT could modulate the switching speed and power consumption by affecting the work done by the damping-like torque, and leads two different reversal dynamical paths during the switching.Furthermore, the origin of incubation time in SOT induced switching is clarified simultaneously.展开更多
Over the pas few decades,the diversified development of antiferomagnetic spintronics has made antiferomagnets(AFMs)interesting and very useful.After tough challenges,the applications of AFMs in electronic devices have...Over the pas few decades,the diversified development of antiferomagnetic spintronics has made antiferomagnets(AFMs)interesting and very useful.After tough challenges,the applications of AFMs in electronic devices have transitioned from focusing on the interface coupling features to achieving the manipulation and detection of AFMs.As AFMs are internally magnetic,taking full use of AFMs for information storage has been the main target of research.In this paper,we provide a comprehensive description of AFM spintronics applications from the interface coupling,read-out operations,and writing manipulations perspective.We examine the early use of AFMs in magnetic recordings and conventional magnetoresistive random-access memory(MRAM),and review the latest mechanisms of the manipulation and detection of AFMs.Finally,based on exchange bias(EB)manipulation,a high-performance EB-MRAM is introduced as the next generation of AFM-based memories,which provides an effective method for read-out and writing of AFMs and opens a new era for AFM spintronics.展开更多
Perpendicular magnetic anisotropy-based magnetic tunnel junctions(p-MTJs) with low Gilbert damping constant(α) are of particular interest for fast and low-power consumption magnetic random-access memory(MRAM). Howeve...Perpendicular magnetic anisotropy-based magnetic tunnel junctions(p-MTJs) with low Gilbert damping constant(α) are of particular interest for fast and low-power consumption magnetic random-access memory(MRAM). However, obtaining a faster switching speed and lower power consumption is still a big challenge. Herein, we report a Mo-based perpendicular double free layer structure with a low Gilbert damping constant of 0.02 relative to W-based films, as measured by time-resolved magnetooptical Kerr effect equipment. To show the influence of different film structures on the Gilbert damping constant, we measured the Mo-based single free layer. Thereafter, we deposited the full stacks with the Mo-based double free layer and obtained a high tunneling magnetoresistance of 136.3% and high thermal stability. The results of high-resolution transmission electron microscopy(HR-TEM) and energy-dispersive X-ray spectroscopy(EDS) showed that the Mo-based films had better crystallinity,sharper interfaces, and weaker diffusion than the W-based films and thus produced a weaker external contribution of the Gilbert damping constant. As a result of the weak spin-orbit coupling in the Mo-based structure, the intrinsic contribution of the Gilbert damping constant was also weak, thereby leading to the small Gilbert damping constant of the Mo-based stacks. In addition, the macro-spin simulation results demonstrated that the magnetization switching by the spin transfer torque of the Mo-based MTJs was faster than that of the W-based MTJs. These findings help to understand the mechanism behind the good performance of Mo-based p-MTJ films and show the great promise of these structures in low-power consumption MRAM or other spintronic devices.展开更多
Magnetic droplets,a class of highly nonlinear magnetodynamic solitons,can be nucleated and stabilized in nanocontact spintorque nano-oscillators.Here we experimentally demonstrate magnetic droplets in magnetic tunnel ...Magnetic droplets,a class of highly nonlinear magnetodynamic solitons,can be nucleated and stabilized in nanocontact spintorque nano-oscillators.Here we experimentally demonstrate magnetic droplets in magnetic tunnel junctions(MTJs).The droplet nucleation is accompanied by power enhancement compared with its ferromagnetic resonance modes.The nucleation and stabilization of droplets are ascribed to the double-Co Fe B free-layer structure in the all-perpendicular MTJ,which provides a low Zhang-Li torque and a high pinning field.Our results enable better electrical sensitivity in fundamental studies of droplets and show that the droplets can be utilized in MTJ-based applications and materials science.展开更多
基金supported by the National Key Research and Development Program of China (Nos.2021YFB3601303,2021YFB3601304,2021YFB3601300,2022YFB4400200,2022YFB4400201,2022YFB4400203)the National Natural Science Foundation of China (Grant No.62171013)。
文摘We have successfully demonstrated a 1 Kb spin-orbit torque(SOT)magnetic random-access memory(MRAM)multiplexer(MUX)array with remarkable performance.The 1 Kb MUX array exhibits an in-die function yield of over 99.6%.Additionally,it provides a sufficient readout window,with a TMR/RP_sigma%value of 21.4.Moreover,the SOT magnetic tunnel junctions(MTJs)in the array show write error rates as low as 10^(-6)without any ballooning effects or back-hopping behaviors,ensuring the write stability and reliability.This array achieves write operations in 20 ns and 1.2 V for an industrial-level temperature range from-40 to 125℃.Overall,the demonstrated array shows competitive specifications compared to the state-of-the-art works.Our work paves the way for the industrial-scale production of SOT-MRAM,moving this technology beyond R&D and towards widespread adoption.
基金supported by the National Key Research and Development Program of China(Grant Nos.2021YFB3601303,2021YFB3601304,2021YFB3601300)National Natural Science Foundation of China(Nos.62001014 and 62171013)。
文摘We demonstrate in-plane field-free-switching spin-orbit torque(SOT)magnetic tunnel junction(MTJ)devices that are capable of low switching current density,fast speed,high reliability,and,most importantly,manufactured uniformly by the 200-mm-wafer platform.The performance of the devices is systematically studied,including their magnetic properties,switch-ing behaviors,endurance and data retention.The successful integration of SOT devices within the 200-mm-wafer manufactur-ing platform provides a feasible way to industrialize SOT MRAMs.It is expected to obtain excellent performance of the devices by further optimizing the MTJ film stacks and the corresponding fabrication processes in the future.
基金financial support from the National Key R&D Program of China(2018YFB0407602,and 2020YFA0309300)National Natural Science Foundation of China(61627813,61871008,62001019,12004024,and 51901081)+5 种基金Beijing Natural Science Foundation(4202043)Beijing Nova Program from Beijing Municipal Science and Technology Commission(Z201100006820042)National Natural Science Foundation of China-German Research Foundation(52061135105)Outstanding Research Project of Shen Yuan Honors College,BUAA(230121102)the Science and Technology Program of Guangzhou(202002030052)Joint Research Key Fund for Guangzhou and Shen Zhen(2021B1515120047)。
文摘Chiral magnetic skyrmions are topological swirling spin textures that hold promise for future information technology. The electrical nucleation and motion of skyrmions have been experimentally demonstrated in the last decade, while electrical detection compatible with semiconductor processes has not been achieved, and this is considered one of the most crucial gaps regarding the use of skyrmions in real applications. Here, we report the direct observation of nanoscale skyrmions in Co Fe B/Mg O-based magnetic tunnel junction devices at room temperature. High-resolution magnetic force microscopy imaging and tunneling magnetoresistance measurements are used to illustrate the electrical detection of skyrmions,which are stabilized under the cooperation of interfacial Dzyaloshinskii–Moriya interaction, perpendicular magnetic anisotropy, and dipolar stray field. This skyrmionic magnetic tunnel junction shows a stable nonlinear multilevel resistance thanks to its topological nature and tunable density of skyrmions under current pulse excitation. These features provide important perspectives for spintronics to realize highdensity memory and neuromorphic computing.
基金supported by the National Key Research and Development Program of China (Grant Nos. 2021YFB3601303, and 2021YFB3601300)the National Natural Science Foundation of China (Grant Nos. 92164206, 61904009, and 62001014) for their financial support of this work。
文摘The current-induced spin-orbit torque(SOT) is one of the most promising ways for high speed and low power spintronics devices. However, the mechanism of SOT driven magnetization reversal, especially the role of the field-like torque(FLT), is still unclear. Here, we report the observed promotion and suppression of switching by FLT, which depends on the relative direction of FLT and spin polarization. Our results reveal that the FLT could modulate the switching speed and power consumption by affecting the work done by the damping-like torque, and leads two different reversal dynamical paths during the switching.Furthermore, the origin of incubation time in SOT induced switching is clarified simultaneously.
基金the National Key Research and Development Program of China(Grants No.2021YFB3601303,2021YFB3601300)the National Natural Science Foundation of China(Grants No.92164206,61904009,62001014 and 61627813)for their financial support of this work.
文摘Over the pas few decades,the diversified development of antiferomagnetic spintronics has made antiferomagnets(AFMs)interesting and very useful.After tough challenges,the applications of AFMs in electronic devices have transitioned from focusing on the interface coupling features to achieving the manipulation and detection of AFMs.As AFMs are internally magnetic,taking full use of AFMs for information storage has been the main target of research.In this paper,we provide a comprehensive description of AFM spintronics applications from the interface coupling,read-out operations,and writing manipulations perspective.We examine the early use of AFMs in magnetic recordings and conventional magnetoresistive random-access memory(MRAM),and review the latest mechanisms of the manipulation and detection of AFMs.Finally,based on exchange bias(EB)manipulation,a high-performance EB-MRAM is introduced as the next generation of AFM-based memories,which provides an effective method for read-out and writing of AFMs and opens a new era for AFM spintronics.
基金supported by the National Key R&D Program of China(Grant No.2018YFB0407602)the National Natural Science Foundation of China(Grant Nos.92164206,12104031,11904016,and 61627813)+4 种基金the Science and Technology Major Project of Anhui Province(Grant No.202003a05020050)the International Collaboration Project(Grant No.B16001)the National Key Technology Program of China(Grant No.2017ZX01032101)the Beihang Hefei Innovation Research Institute Project(Grant Nos.BHKX-19-01,and BHKX-19-02)the Guangdong Provincial Department of Science and Technology(Grant No.2020A1515011425)。
文摘Perpendicular magnetic anisotropy-based magnetic tunnel junctions(p-MTJs) with low Gilbert damping constant(α) are of particular interest for fast and low-power consumption magnetic random-access memory(MRAM). However, obtaining a faster switching speed and lower power consumption is still a big challenge. Herein, we report a Mo-based perpendicular double free layer structure with a low Gilbert damping constant of 0.02 relative to W-based films, as measured by time-resolved magnetooptical Kerr effect equipment. To show the influence of different film structures on the Gilbert damping constant, we measured the Mo-based single free layer. Thereafter, we deposited the full stacks with the Mo-based double free layer and obtained a high tunneling magnetoresistance of 136.3% and high thermal stability. The results of high-resolution transmission electron microscopy(HR-TEM) and energy-dispersive X-ray spectroscopy(EDS) showed that the Mo-based films had better crystallinity,sharper interfaces, and weaker diffusion than the W-based films and thus produced a weaker external contribution of the Gilbert damping constant. As a result of the weak spin-orbit coupling in the Mo-based structure, the intrinsic contribution of the Gilbert damping constant was also weak, thereby leading to the small Gilbert damping constant of the Mo-based stacks. In addition, the macro-spin simulation results demonstrated that the magnetization switching by the spin transfer torque of the Mo-based MTJs was faster than that of the W-based MTJs. These findings help to understand the mechanism behind the good performance of Mo-based p-MTJ films and show the great promise of these structures in low-power consumption MRAM or other spintronic devices.
基金supported by the Beijing Municipal Science and Technology Project(Grant No.Z201100004220002)the National Natural Science Foundation of China(Grant Nos.61627813,61904009)the China Postdoctoral Science Foundation Funded Project(Grant No.2018M641151)。
文摘Magnetic droplets,a class of highly nonlinear magnetodynamic solitons,can be nucleated and stabilized in nanocontact spintorque nano-oscillators.Here we experimentally demonstrate magnetic droplets in magnetic tunnel junctions(MTJs).The droplet nucleation is accompanied by power enhancement compared with its ferromagnetic resonance modes.The nucleation and stabilization of droplets are ascribed to the double-Co Fe B free-layer structure in the all-perpendicular MTJ,which provides a low Zhang-Li torque and a high pinning field.Our results enable better electrical sensitivity in fundamental studies of droplets and show that the droplets can be utilized in MTJ-based applications and materials science.