Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than the diffraction limit,making it a useful method for efficient nanomanufacturing.However,compared with the low-spatial-frequency LIPSS(LSFL),the structure size of the HSFL is smaller,and it is more easily submerged.Therefore,the formation mechanism of HSFL is complex and has always been a research hotspot in this field.In this study,regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm,50 fs femtosecond laser.The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method.In general,the evolution of the surface structure undergoes five sequential stages:the LSFL begins to split,becomes uniform HSFL,degenerates into an irregular LSFL,undergoes secondary splitting into a weakly uniform HSFL,and evolves into an irregular LSFL or is submerged.The results indicate that the local enhancement of the submerged nanocavity,or the nanoplasma,in the prefabricated LSFL ridge led to the splitting of the LSFL,and the thermodynamic effect drove the homogenization of the splitting LSFL,which evolved into HSFL.

Large-area straight,regular periodic surface structures produced on fused silica by the interference of two femtosecond laser beams through cylindrical lens

Inhomogeneity and low efficiency are two important factors that limit the application of laser-induced periodic surface structures(LIPSSs),especially on glass surfaces.In this study,two-beam interference(TBI)of femtosecond lasers was used to produce large-area straight LIPSSs on fused silica using cylindrical lenses.Compared with those produced us-ing a single circular or cylindrical lens,the LIPSSs produced by TBI are much straighter and more regular.Depending on the laser fluence and scanning velocity,LIPSSs with grating-like or spaced LIPSSs are produced on the fused silica sur-face.Their structural colors are blue,green,and red,and only green and red,respectively.Grating-like LIPSS patterns oriented in different directions are obtained and exhibit bright and vivid colors,indicating potential applications in surface coloring and anti-counterfeiting logos.

Femtosecond laser-induced periodic structures:mechanisms, techniques, and applications

Over the past two decades,femtosecond laser-induced periodic structures(femtosecond-LIPSs)have become ubiquitous in a variety of materials,including metals,semiconductors,dielectrics,and polymers.Femtosecond-LIPSs have become a useful laser processing method,with broad prospects in adjusting material properties such as structural color,data storage,light absorption,and luminescence.This review discusses the formation mechanism of LIPSs,specifically the LIPS formation processes based on the pump-probe imaging method.The pulse shaping of a femtosecond laser in terms of the time/frequency,polarization,and spatial distribution is an efficient method for fabricating high-quality LIPSs.Various LIPS applications are also briefly introduced.The last part of this paper discusses the LIPS formation mechanism,as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications.

Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

Femtosecond laser-induced periodic surface structures(LIPSS) have several applications in surface structuring and functionalization. Three major challenges exist in the fabrication of regular and uniform LIPSS: enhancing the periodic energy deposition, reducing the residual heat, and avoiding the deposited debris. Herein, we fabricate an extremely regular low-spatial-frequency LIPSS(LSFL) on a silicon surface by a temporally shaped femtosecond laser. Based on a 4 f configuration zero-dispersion pulse shaping system, a Fourier transform limit(FTL) pulse is shaped into a pulse train with varying intervals in the range of 0.25–16.2 ps using periodic π-phase step modulation. Under the irradiation of the shaped pulse with an interval of 16.2 ps, extremely regular LSFLs are efficiently fabricated on silicon. The scan velocity for fabricating regular LSFL is 2.3 times faster, while the LSFL depth is 2 times deeper, and the diffraction efficiency is 3 times higher than those of LSFL using the FTL pulse.The formation mechanisms of regular LSFL have been studied experimentally and theoretically. The results show that the temporally shaped pulse enhances the excitation of surface plasmon polaritons and the periodic energy deposition while reducing the residual thermal effects and avoiding the deposition of the ejected debris, eventually resulting in regular and deeper LSFL on the silicon surface.

Large area patterning of ultra-high thermal-stable structural colors in transparent solids

Printing stable color with a lithography-free and environment-friendly technique is in high demand for applications.We report a facile strategy of ultrafast laser direct writing(ULDW)to produce large-scale embedded structural colors inside transparent solids.The diffraction effect of gratings enables effective generation of structural colors across the entire visible spectrum.The structural colors inside the fused silica glass have been demonstrated to exhibit excellent thermal stability under high temperature up to 1200℃, which promises that the written information can be stable for long time even with unlimited lifetime at room temperature.The structural colors in the applications of coloring,anti-counterfeiting,and information storage are also demonstrated.Our studies indicate that the presented ULDW allows for fabricating large-scale and high thermal-stability structural colors with prospects of three-dimensional patterning,which will find various applications,especially under harsh conditions such as high temperature.

Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens

Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings(RUSNGs)on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors(including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.