SnO_2 nanowires and ZnO nanorods were grown on the surface of thin film by heat treatment of mental Sn and Zn under Ar gas flow and O_2 atmospheric pressure.The sensitivity of the SnO_2 thin film device on which grown...SnO_2 nanowires and ZnO nanorods were grown on the surface of thin film by heat treatment of mental Sn and Zn under Ar gas flow and O_2 atmospheric pressure.The sensitivity of the SnO_2 thin film device on which grown nanowires to CO gas(concentration of 5000μg/g)was 50% at the operating temperature of 200℃.In case of using Pt as catalysts,the sensitivity was enhanced and operating temperature was reduced(sensitivity of 70% at the operating temperature of 150℃). The sensitivity of the ZnO nanorods device using Cu as catalysts to NO_x gas was 90% at the operating temperature of 200℃.It was found that the sensitivity to CO and NO_x gases for the device on which grown nanostructures was much higher than those for general thin films devices.展开更多
Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against...Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.展开更多
文摘SnO_2 nanowires and ZnO nanorods were grown on the surface of thin film by heat treatment of mental Sn and Zn under Ar gas flow and O_2 atmospheric pressure.The sensitivity of the SnO_2 thin film device on which grown nanowires to CO gas(concentration of 5000μg/g)was 50% at the operating temperature of 200℃.In case of using Pt as catalysts,the sensitivity was enhanced and operating temperature was reduced(sensitivity of 70% at the operating temperature of 150℃). The sensitivity of the ZnO nanorods device using Cu as catalysts to NO_x gas was 90% at the operating temperature of 200℃.It was found that the sensitivity to CO and NO_x gases for the device on which grown nanostructures was much higher than those for general thin films devices.
文摘Recently,the possibility of a disaster due to the improper use of highly toxic gases which are known as agents throughout the world has been increased.Therefore,the development of technology for countermeasure against CWA has been highly demanded.In this study,thick film SnO_2-based gas sensing devices were prepared and the sensing properties for the four different kinds of simulants such as dimethyl methyl phosphonate (DMMP),acetonitrile,dichloromethane and dipropylene glycol methyl ether have been investigated.And a micro sensor array consists of six devices was prepared using MEMS technology to provide high selective and reliable sensing system for the detection of chemical warfare agents.The micro gas sensor array prepared showed good sensitivity and selectivity to CWA.
