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In-situ stitching interferometric test system for large piano optics
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作者 Xin Wu Ying-Jie yu +1 位作者 ke-bing mou Wei-Rong Wang 《Advances in Manufacturing》 SCIE CAS CSCD 2018年第2期195-203,共9页
In-situ testing is an ideal technology for improv- ing the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large piano optics in the workshop envi... In-situ testing is an ideal technology for improv- ing the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large piano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle ofin- situ subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm×780 mm, and repeatability is smaller than 0.03λ. The paper also dis- cusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable. 展开更多
关键词 In-situ measurement Subaperture stitching Dynamic interferometry Large plano optics
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