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Fabrication of GaAs/Si Heterostructures and Their Photoelectric Properties
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作者 LIU Xiang WU Chang-shu +2 位作者 ZHANG Peng-xiang LIU Li-lai kim tae-whan 《Semiconductor Photonics and Technology》 CAS 2007年第2期146-149,163,共5页
Fabrication of GaAs/Si heterostructures and their photoelectric properties are investigated by Raman, photoluminescence and Hall-effect measurements. The crystallinity of GaAs epilayers grown on Si substrate is signif... Fabrication of GaAs/Si heterostructures and their photoelectric properties are investigated by Raman, photoluminescence and Hall-effect measurements. The crystallinity of GaAs epilayers grown on Si substrate is significantly affected by the substrate orientation and the growth method. The photoelectric properties of GaAs epilayers grown on Si (211) substrates deposited by using a two-step growth method are improved. These results indicate that GaAs epilayers grown on Si (100) and Si (211) substrates by using two-step growth method are promising for potential applications in high-speed and high-frequency photoelectric devices. 展开更多
关键词 HETEROSTRUCTURE two-step growth buffer layer
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